Title: Replication of patterned thin-film structures for use in plasmonics and metamaterials

Abstract

The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.

Inventors:

Norris, David J; Han, Sang Eon; Bhan, Aditya; Nagpal, Prashant; Lindquist, Nathan Charles; Oh, Sang-Hyun

Issue Date:

Tue Feb 03 00:00:00 EST 2015

Research Org.:

Univ. of Minnesota, Minneapolis, MN (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1169060

Patent Number(s):

8948562

Application Number:

13/131,197

Assignee:

Regents of the University of Minnesota (St. Paul, MN)

Patent Classifications (CPCs):

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

B81C1/00119 - {Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems}
B81C99/009 - {Manufacturing the stamps or the moulds}

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
B82Y40/00 - Manufacture or treatment of nanostructures

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

G02B1/002 - {made of materials engineered to provide properties not available in nature, e.g. metamaterials}
G02B5/008 - {Surface plasmon devices
G02B6/1226 - {involving surface plasmon interaction}

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES

G03F7/0002 - {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L31/02327 - {the optical elements being integrated or being directly associated to the device, e.g. back reflectors
H01L31/054 - Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

Y02E10/52 - PV systems with concentrators

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

Y10T428/12486 - Laterally noncoextensive components [e.g., embedded, etc.]
Y10T428/12493 - Composite
Y10T428/12507 - More than two components

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DOE Contract Number:  

FG02-06ER46438

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

70 PLASMA PHYSICS AND FUSION TECHNOLOGY