Microcantilever-based gas sensor employing two simultaneous physical sensing modes
Abstract
According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1134683
- Patent Number(s):
- 8762075
- Application Number:
- 12/852,416
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC52-07NA27344
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2010 Aug 06
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Loui, Albert, Sirbuly, Donald J, Elhadj, Selim, McCall, Scott K, Hart, Bradley R, and Ratto, Timothy V. Microcantilever-based gas sensor employing two simultaneous physical sensing modes. United States: N. p., 2014.
Web.
Loui, Albert, Sirbuly, Donald J, Elhadj, Selim, McCall, Scott K, Hart, Bradley R, & Ratto, Timothy V. Microcantilever-based gas sensor employing two simultaneous physical sensing modes. United States.
Loui, Albert, Sirbuly, Donald J, Elhadj, Selim, McCall, Scott K, Hart, Bradley R, and Ratto, Timothy V. Tue .
"Microcantilever-based gas sensor employing two simultaneous physical sensing modes". United States. https://www.osti.gov/servlets/purl/1134683.
@article{osti_1134683,
title = {Microcantilever-based gas sensor employing two simultaneous physical sensing modes},
author = {Loui, Albert and Sirbuly, Donald J and Elhadj, Selim and McCall, Scott K and Hart, Bradley R and Ratto, Timothy V},
abstractNote = {According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 24 00:00:00 EDT 2014},
month = {Tue Jun 24 00:00:00 EDT 2014}
}
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Works referenced in this record:
Multicomponent thermal conductivity analyzer
patent, August 1979
- Jackson, Milton L.
- US Patent Document 4,164,862
Apparatus for detecting a residual quantity of toner
patent, February 1982
- Kuru, Hiroshi; Akiyama, Mitsuo; Ikemoto, Isao
- US Patent Document 4,314,242
Electronic nerve agent detector
patent, October 1985
- Kolesar, Jr., Edward S.
- US Patent Document 4,549,427
Composition sensor with minimal non-linear thermal gradients
patent, November 1987
- Johnson, Robert G.
- US Patent Document 4,706,061
Apparatus for monitoring impurities in a gas stream
patent, August 1994
- DiLeo, Anthony; Snow, James T.; Cote, Daniel
- US Patent Document 5,339,675
Atomic force microscope having cantilever with piezoresistive deflection sensor
patent, September 1994
- Albrecht, Thomas R.; Tortonese, Marco; Barrett, Robert
- US Patent Document 5,345,815
Microbar sensor
patent, August 1995
- Wachter, Eric A.; Thundat, Thomas G.
- US Patent Document 5,445,008
Microcantilever sensor
patent, February 1998
- Thundat, Thomas G.; Wachter, Eric A.
- US Patent Document 5,719,324
Scanning probe microscope for use in fluids
patent, May 1998
- Lindsay, Stuart; Jing, Tianwei
- US Patent Document 5,750,989
Thermal conductivity measuring device
patent, May 1998
- Muto, Hiroyuki; Kajio, Yasuhiro; Kamiunten, Shoji
- US Patent Document 5,756,878
Gas analysis or leak detection process and device for same
patent, May 1998
- Stockli, Armin; Walchli, Urs; Bosch, Martin
- US Patent Document 5,756,881
Microcantilever detector for explosives
patent, June 1999
- Thundat, Thomas G.
- US Patent Document 5,918,263
Method and apparatus for sensing the natural frequency of a cantilevered body
patent, March 2000
- Duncan, Michael G.
- US Patent Document 6,041,642
Thermoelastic self-actuation in piezoresistive resonators
patent, July 2009
- Bargatin, Igor; Arlett, Jessica L.; Roukes, Michael L.
- US Patent Document 7,555,938
Systems and methods for monitoring solids using mechanical resonator
patent, December 2009
- Burdett, Ian D.; Lynn, Timothy D.; Kolosov, Oleg
- US Patent Document 7,634,937
Method and apparatus for compressing a gas to a high pressure
patent-application, August 2005
- Ursan, Mihai; Gram, Anker; Gavril, Gabriel
- US Patent Application 10/508617; 20050180864
Liquid cell and passivated probe for atomic force microscopy and chemical sensing
patent-application, September 2005
- Adams, Jesse D.; Rogers, Benjamin S.; Sulchek, Todd A.
- US Patent Application 11/089559; 20050199047
Cantilevered Probe Detector With Piezoelectric Element
patent-application, April 2008
- Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C.
- US Patent Application 11/576443; 20080085212
Calibration Systems and Methods for Tracer Gas Leak Detection
patent-application, April 2010
- Flynn, Kevin; Dodai, Charles; Geist, J. Daniel
- US Patent Application 12/254279; 20100095745
Thermal Gas Sensor
patent-application, May 2010
- De Coulon, Yves; Chetelat, Olivier; Brodard, Marc
- US Patent Application 12/527523; 20100116024
Fluid Probe
patent-application, December 2011
- Djakov, Vladislav; Huq, Ejaz; Vernon, Paul
- US Patent Application 13/218052; 20110302996
Viscous damping of microresonators for gas composition analysis
journal, April 2006
- Xu, Yang; Lin, J. -T.; Alphenaar, Bruce W.
- Applied Physics Letters, Vol. 88, Issue 14
Modeling and performance of uncoated microcantilever-based chemical sensors
journal, January 2010
- Tétin, Sébastien; Caillard, Benjamin; Ménil, Francis
- Sensors and Actuators B: Chemical, Vol. 143, Issue 2, p. 555-560
Piezoelectric Sorption Detector.
journal, August 1964
- King, W. H.
- Analytical Chemistry, Vol. 36, Issue 9
Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
journal, January 1992
- Blom, F. R.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 10, Issue 1
Acoustic Wave Microsensor Arrays for Vapor Sensing
journal, July 2000
- Grate, Jay W.
- Chemical Reviews, Vol. 100, Issue 7
Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors
journal, October 2003
- Dücso, C.; Ádám, M.; Fürjes, P.
- Sensors and Actuators B: Chemical, Vol. 95, Issue 1-3, p. 189-194
Dynamic thermal conductivity sensor for gas detection
journal, March 2004
- Tardy, Pascal; Coulon, Jean-René; Lucat, Claude
- Sensors and Actuators B: Chemical, Vol. 98, Issue 1, p. 63-68
Thermal conduction between a heated microcantilever and a surrounding air environment
journal, June 2009
- Kim, Kyoung Joon; King, William P.
- Applied Thermal Engineering, Vol. 29, Issue 8-9, p. 1631-1641
Detection and discrimination of pure gases and binary mixtures using a dual-modality microcantilever sensor
journal, April 2010
- Loui, A.; Sirbuly, D. J.; Elhadj, S.
- Sensors and Actuators A: Physical, Vol. 159, Issue 1, p. 58-63
An analytic model of thermal drift in piezoresistive microcantilever sensors
journal, March 2010
- Loui, A.; Elhadj, S.; Sirbuly, D. J.
- Journal of Applied Physics, Vol. 107, Issue 5
Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications
journal, April 2002
- Simon, Isolde; Arndt, Michael
- Sensors and Actuators A: Physical, Vol. 97-98, p. 104-108