Optically transduced MEMS gyro device
Abstract
A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1132527
- Patent Number(s):
- 8726730
- Application Number:
- 13/325,683
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01C - MEASURING DISTANCES, LEVELS OR BEARINGS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Dec 14
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Nielson, Gregory N, Bogart, Gregory R, Langlois, Eric, and Okandan, Murat. Optically transduced MEMS gyro device. United States: N. p., 2014.
Web.
Nielson, Gregory N, Bogart, Gregory R, Langlois, Eric, & Okandan, Murat. Optically transduced MEMS gyro device. United States.
Nielson, Gregory N, Bogart, Gregory R, Langlois, Eric, and Okandan, Murat. Tue .
"Optically transduced MEMS gyro device". United States. https://www.osti.gov/servlets/purl/1132527.
@article{osti_1132527,
title = {Optically transduced MEMS gyro device},
author = {Nielson, Gregory N and Bogart, Gregory R and Langlois, Eric and Okandan, Murat},
abstractNote = {A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 20 00:00:00 EDT 2014},
month = {Tue May 20 00:00:00 EDT 2014}
}
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