Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators
Abstract
A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1088940
- Patent Number(s):
- 8497747
- Application Number:
- 13/039,029
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Wojciechowski, Kenneth E, Olsson, III, Roy H, and Ziaei-Moayyed, Maryam. Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators. United States: N. p., 2013.
Web.
Wojciechowski, Kenneth E, Olsson, III, Roy H, & Ziaei-Moayyed, Maryam. Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators. United States.
Wojciechowski, Kenneth E, Olsson, III, Roy H, and Ziaei-Moayyed, Maryam. Tue .
"Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators". United States. https://www.osti.gov/servlets/purl/1088940.
@article{osti_1088940,
title = {Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators},
author = {Wojciechowski, Kenneth E and Olsson, III, Roy H and Ziaei-Moayyed, Maryam},
abstractNote = {A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 30 00:00:00 EDT 2013},
month = {Tue Jul 30 00:00:00 EDT 2013}
}
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