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Title: Method and system for laser-based formation of micro-shapes in surfaces of optical elements

Abstract

A method of forming a surface feature extending into a sample includes providing a laser operable to emit an output beam and modulating the output beam to form a pulse train having a plurality of pulses. The method also includes a) directing the pulse train along an optical path intersecting an exposed portion of the sample at a position i and b) focusing a first portion of the plurality of pulses to impinge on the sample at the position i. Each of the plurality of pulses is characterized by a spot size at the sample. The method further includes c) ablating at least a portion of the sample at the position i to form a portion of the surface feature and d) incrementing counter i. The method includes e) repeating steps a) through d) to form the surface feature. The sample is free of a rim surrounding the surface feature.

Inventors:
;
Issue Date:
Research Org.:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1083453
Patent Number(s):
8389889
Application Number:
12/818,094
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
B - PERFORMING OPERATIONS B29 - WORKING OF PLASTICS B29D - PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Bass, Isaac Louis, and Guss, Gabriel Mark. Method and system for laser-based formation of micro-shapes in surfaces of optical elements. United States: N. p., 2013. Web.
Bass, Isaac Louis, & Guss, Gabriel Mark. Method and system for laser-based formation of micro-shapes in surfaces of optical elements. United States.
Bass, Isaac Louis, and Guss, Gabriel Mark. Tue . "Method and system for laser-based formation of micro-shapes in surfaces of optical elements". United States. https://www.osti.gov/servlets/purl/1083453.
@article{osti_1083453,
title = {Method and system for laser-based formation of micro-shapes in surfaces of optical elements},
author = {Bass, Isaac Louis and Guss, Gabriel Mark},
abstractNote = {A method of forming a surface feature extending into a sample includes providing a laser operable to emit an output beam and modulating the output beam to form a pulse train having a plurality of pulses. The method also includes a) directing the pulse train along an optical path intersecting an exposed portion of the sample at a position i and b) focusing a first portion of the plurality of pulses to impinge on the sample at the position i. Each of the plurality of pulses is characterized by a spot size at the sample. The method further includes c) ablating at least a portion of the sample at the position i to form a portion of the surface feature and d) incrementing counter i. The method includes e) repeating steps a) through d) to form the surface feature. The sample is free of a rim surrounding the surface feature.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 05 00:00:00 EST 2013},
month = {Tue Mar 05 00:00:00 EST 2013}
}

Works referenced in this record:

Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO 2 laser
conference, May 2006


Methods for mitigating surface damage growth in NIF final optics
conference, March 2002


Localized CO 2 -laser treatment for mitigation of 351-nm damage growth in fused silica
conference, March 2002


Method and system for high-speed, precise micromachining an array of devices
patent, October 2005


Mitigation of laser damage growth in fused silica with a galvanometer scanned CO2 laser
conference, December 2005

  • Bass, Isaac L.; Guss, Gabriel M.; Hackel, Richard P.
  • Boulder Damage Symposium XXXVII: Annual Symposium on Optical Materials for High Power Lasers
  • https://doi.org/10.1117/12.638828

Method for producing damage resistant optics
patent, February 2003


CO2 laser and plasma microjet process for improving laser optics
patent, September 2003


Method and system for ultrafast photoelectron microscope
patent, December 2006


Laser machining of glass-ceramic materials
patent, September 1997


Method and device for machining holes or shapes of varying profile using an excimer laser
patent, December 2001