Ultra-high density diffraction grating
Abstract
A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1082356
- Patent Number(s):
- 8331027
- Application Number:
- 12/510,900
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B29 - WORKING OF PLASTICS B29D - PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
- DOE Contract Number:
- AC02-05CH11231
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2009 Jul 28
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., and Gullikson, Eric M. Ultra-high density diffraction grating. United States: N. p., 2012.
Web.
Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., & Gullikson, Eric M. Ultra-high density diffraction grating. United States.
Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., and Gullikson, Eric M. Tue .
"Ultra-high density diffraction grating". United States. https://www.osti.gov/servlets/purl/1082356.
@article{osti_1082356,
title = {Ultra-high density diffraction grating},
author = {Padmore, Howard A. and Voronov, Dmytro L. and Cambie, Rossana and Yashchuk, Valeriy V. and Gullikson, Eric M.},
abstractNote = {A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 11 00:00:00 EST 2012},
month = {Tue Dec 11 00:00:00 EST 2012}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Replication as an alternative approach for large segmented telescopes
conference, July 2004
- Ulmer, Melville P.; Graham, Michael E.; Vanyman, Semyon
- Second Backaskog Workshop on Extremely Large Telescopes, SPIE Proceedings
Soft X-Ray Optics. Recent Progress in Soft X-Ray Multilayer Mirrors through Atomic Layer Deposition/Epitaxy Methods. [軟Ｘ線オプティックス 原子層堆積／成長法による軟Ｘ線多層膜ミラーの新展開]
journal, January 1997
- Kumagai, Hiroshi
- The Review of Laser Engineering, Vol. 25, Issue 5
Multilayer‐coated echelle gratings for soft x rays and extreme ultraviolet
journal, February 1995
- Underwood, J. H.; Malek, C. Khan; Gullikson, E. M.
- Review of Scientific Instruments, Vol. 66, Issue 2
High-throughput replica optics
journal, January 1988
- de Korte, Piet A. J.
- Applied Optics, Vol. 27, Issue 8
Picosecond and femtosecond Fourier pulse shape synthesis
journal, January 1987
- Weiner, A. M.; Heritage, J. P.
- Revue de Physique Appliquée, Vol. 22, Issue 12
Optical properties of sliced multilayer gratings
journal, September 2002
- Fechtchenko, R. M.; Vinogradov, A. V.; Voronov, D. L.
- Optics Communications, Vol. 210, Issue 3-6
Production and performance of multilayer-coated conical x-ray mirrors
journal, January 2003
- Ulmer, Melville P.; Altkorn, Robert; Graham, Michael E.
- Applied Optics, Vol. 42, Issue 34
5000 groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range
conference, August 2009
- Voronov, Dmitriy L.; Anderson, Erik H.; Cambie, Rossana
- SPIE Optical Engineering + Applications, SPIE Proceedings
Development of an ultrahigh-resolution diffraction grating for soft x-rays
conference, September 2007
- Voronov, Dmitriy L.; Cambie, Rossana; Feshchenko, Ruslan M.
- Optical Engineering + Applications, SPIE Proceedings
Elastic memory composite technology for thin, lightweight, space- and ground-based deployable mirrors
conference, December 2003
- Arzberger, Steven C.; Munshi, Naseem A.; Lake, Mark S.
- Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings
High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating
journal, June 1994
- Levashov, V. E.; Zubarev, E. N.; Fedorenko, A. I.
- Optics Communications, Vol. 109, Issue 1-2
Fabrication and characterization of a new high density Sc/Si multilayer sliced grating
conference, August 2008
- Voronov, Dmitriy L.; Cambie, Rossana; Gullikson, Eric M.
- Optical Engineering + Applications, SPIE Proceedings
Status and limitations of multilayer X-ray interference structures
journal, April 1996
- Kortright, J. B.
- Journal of Magnetism and Magnetic Materials, Vol. 156, Issue 1-3
Super-smooth x-ray reflection grating fabrication
journal, November 1997
- Franke, A. E.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6
Grazing incidence replica optics for astronomical and laboratory applications
journal, January 1988
- Hudec, Rene; Valnicek, Boris; Aschenbach, Bernd
- Applied Optics, Vol. 27, Issue 8
Fabrication of sawtooth diffraction gratings using nanoimprint lithography
journal, January 2003
- Chang, Chih-Hao; Heilmann, R. K.; Fleming, R. C.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6