Title: Targets and processes for fabricating same

Abstract

In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 .mu.m. In particular examples, the distance is less than about 1 .mu.m. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.

Inventors:

Cowan, Thomas ^[1]; Malekos, Steven ^[2]; Korgan, Grant ^[2]; Adams, Jesse ^[2]; Sentoku, Yasuhiko ^[2]; Le Galloudec, Nathalie ^[2]; Fuchs, Julien ^[3]

---

+ Show Inventor Affiliations

1. Dresden, DE
2. Reno, NV
3. Paris, FR

Issue Date:

Tue Jul 24 00:00:00 EDT 2012

Research Org.:

Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada, Reno (Reno, NV)

Sponsoring Org.:

USDOE

OSTI Identifier:

1067331

Patent Number(s):

8229075

Application Number:

12/066,479

Assignee:

Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada, Reno (Reno, NV)

Patent Classifications (CPCs):

G - PHYSICS G21 - NUCLEAR PHYSICS G21B - FUSION REACTORS

H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05G - X-RAY TECHNIQUE

Show more

G - PHYSICS G21 - NUCLEAR PHYSICS G21B - FUSION REACTORS

G21B1/19 - Targets for producing thermonuclear fusion reactions, e.g. pellets for irradiation by laser or charged particle beams

H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05G - X-RAY TECHNIQUE

H05G2/00 - Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
H05G2/001 - {X-ray radiation generated from plasma
H05G2/008 - {involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma}

H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE

H05H1/02 - Arrangements for confining plasma by electric or magnetic fields

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

Y02E30/10 - Fusion reactors

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

Y10T428/12 - All metal or with adjacent metals
Y10T428/12299 - Workpiece mimicking finished stock having nonrectangular or noncircular cross section
Y10T428/1241 - Nonplanar uniform thickness or nonlinear uniform diameter [e.g., L-shape]
Y10T428/12493 - Composite
Y10T428/12806 - Refractory [Group IVB, VB, or VIB] metal-base component
Y10T428/12868 - Group IB metal-base component alternative to platinum group metal-base component [e.g., precious metal, etc.]
Y10T428/12889 - Au-base component
Y10T428/13 - Hollow or container type article [e.g., tube, vase, etc.]

Show less

DOE Contract Number:  

FC52-01NV14050

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE