Cluster generator
Abstract
Described herein is an apparatus and a method for producing atom clusters based on a gas discharge within a hollow cathode. The hollow cathode includes one or more walls. The one or more walls define a sputtering chamber within the hollow cathode and include a material to be sputtered. A hollow anode is positioned at an end of the sputtering chamber, and atom clusters are formed when a gas discharge is generated between the hollow anode and the hollow cathode.
- Inventors:
-
- Urbana, IL
- Champaign, IL
- Issue Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1019407
- Patent Number(s):
- 7951276
- Application Number:
- 11/810,904
- Assignee:
- The Board of Trustees of the University of Illinois (Urbana, IL)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- FG02-91ER45439
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Donchev, Todor I, and Petrov, Ivan G. Cluster generator. United States: N. p., 2011.
Web.
Donchev, Todor I, & Petrov, Ivan G. Cluster generator. United States.
Donchev, Todor I, and Petrov, Ivan G. Tue .
"Cluster generator". United States. https://www.osti.gov/servlets/purl/1019407.
@article{osti_1019407,
title = {Cluster generator},
author = {Donchev, Todor I and Petrov, Ivan G},
abstractNote = {Described herein is an apparatus and a method for producing atom clusters based on a gas discharge within a hollow cathode. The hollow cathode includes one or more walls. The one or more walls define a sputtering chamber within the hollow cathode and include a material to be sputtered. A hollow anode is positioned at an end of the sputtering chamber, and atom clusters are formed when a gas discharge is generated between the hollow anode and the hollow cathode.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 31 00:00:00 EDT 2011},
month = {Tue May 31 00:00:00 EDT 2011}
}
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Works referenced in this record:
Cluster beam synthesis of nanostructured thin films
journal, July 2001
- Milani, P.; Piseri, P.; Barborini, E.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 19, Issue 4