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Title: Polymer-assisted deposition of films

Abstract

A polymer assisted deposition process for deposition of metal oxide films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films and the like. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.

Inventors:
 [1]; ;  [1]; ;  [1]; ;  [1]
  1. Los Alamos, NM
Issue Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
989011
Patent Number(s):
7,604,839
Application Number:
10/888,868
Assignee:
Los Alamos National Security, LLC (Los Alamos, NM)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

McCleskey, Thomas M, Burrell,, Anthony, K, Jia,, Quanxi,, Lin,, and Yuan,. Polymer-assisted deposition of films. United States: N. p., 2009. Web.
McCleskey, Thomas M, Burrell,, Anthony, K, Jia,, Quanxi,, Lin,, & Yuan,. Polymer-assisted deposition of films. United States.
McCleskey, Thomas M, Burrell,, Anthony, K, Jia,, Quanxi,, Lin,, and Yuan,. Tue . "Polymer-assisted deposition of films". United States. https://www.osti.gov/servlets/purl/989011.
@article{osti_989011,
title = {Polymer-assisted deposition of films},
author = {McCleskey, Thomas M and Burrell, and Anthony, K and Jia, and Quanxi, and Lin, and Yuan,},
abstractNote = {A polymer assisted deposition process for deposition of metal oxide films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films and the like. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {10}
}

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