Ultratough CVD single crystal diamond and three dimensional growth thereof

Hemley, Russell J; Mao, Ho-kwang; Yan, Chih-shiue

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Title: Ultratough CVD single crystal diamond and three dimensional growth thereof

Abstract

The invention relates to a single-crystal diamond grown by microwave plasma chemical vapor deposition that has a toughness of at least about 30 MPa m.sup.1/2. The invention also relates to a method of producing a single-crystal diamond with a toughness of at least about 30 MPa m.sup.1/2. The invention further relates to a process for producing a single crystal CVD diamond in three dimensions on a single crystal diamond substrate.

Inventors:

Hemley, Russell J ^[1]; Mao, Ho-kwang ^[1]; Yan, Chih-shiue ^[1]

Washington, DC

Issue Date:: 2009-09-29

Research Org.:: California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 988682

Patent Number(s):: 7594968

Application Number:: 11/222,224

Assignee:: Carnegie Institution of Washington (Washington, DC)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/274 - {using microwave discharges}
C23C16/277 - {using other elements in the gas phase besides carbon and hydrogen
C23C16/279 - {control of diamond crystallography}

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B25/105 - {by irradiation or electric discharge}
C30B29/04 - Diamond

Show less

DOE Contract Number:: FG03-98NV13367

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Hemley, Russell J, Mao, Ho-kwang, and Yan, Chih-shiue. Ultratough CVD single crystal diamond and three dimensional growth thereof.  United States: N. p., 2009. 
        Web.

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                    Hemley, Russell J, Mao, Ho-kwang, & Yan, Chih-shiue. Ultratough CVD single crystal diamond and three dimensional growth thereof.  United States.

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                    Hemley, Russell J, Mao, Ho-kwang, and Yan, Chih-shiue. Tue .  
        "Ultratough CVD single crystal diamond and three dimensional growth thereof".  United States.  https://www.osti.gov/servlets/purl/988682.

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@article{osti_988682,

  title        = {Ultratough CVD single crystal diamond and three dimensional growth thereof},

  author       = {Hemley, Russell J and Mao, Ho-kwang and Yan, Chih-shiue},

  abstractNote = {The invention relates to a single-crystal diamond grown by microwave plasma chemical vapor deposition that has a toughness of at least about 30 MPa m.sup.1/2. The invention also relates to a method of producing a single-crystal diamond with a toughness of at least about 30 MPa m.sup.1/2. The invention further relates to a process for producing a single crystal CVD diamond in three dimensions on a single crystal diamond substrate.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2009},

  month        = {9}

}

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Works referenced in this record:

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Collins, Alan T.; Kanda, Hisao; Kitawaki, Hiroshi
Diamond and Related Materials, Vol. 9, Issue 2
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Jin, S.; Moustakas, T. D.
Applied Physics Letters, Vol. 65, Issue 4
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Moissanite: A Window for High-Pressure Experiments
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Very high growth rate chemical vapor deposition of single-crystal diamond
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Diamond nucleation on iridium buffer layers and subsequent textured growth: A route for the realization of single-crystal diamond films
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Schreck, M.; Hörmann, F.; Roll, H.
Applied Physics Letters, Vol. 78, Issue 2
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Red luminescence in phosphorous-doped chemically vapor deposited diamond
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Journal of Applied Physics, Vol. 82, Issue 1
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Multiple twinning and nitrogen defect center in chemical vapor deposited homoepitaxial diamond
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Yan, Chih-Shiue; Vohra, Yogesh K.
Diamond and Related Materials, Vol. 8, Issue 11
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The coalescence of [001] diamond grains heteroepitaxially grown on (001) silicon
journal, December 1996

Jiang, X.; Jia, C. L.
Applied Physics Letters, Vol. 69, Issue 25
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On the role of penetration twins in the morphological development of vapor-grown diamond films
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Tamor, M. A.; Everson, M. P.
Journal of Materials Research, Vol. 9, Issue 7
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Growth of {100} textured diamond films by the addition of nitrogen
journal, February 1996

Cao, G. Z.; Schermer, J. J.; van Enckevort, W. J. P.
Journal of Applied Physics, Vol. 79, Issue 3
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Fracture of synthetic diamond
journal, September 1995

Drory, M. D.; Dauskardt, R. H.; Kant, A.
Journal of Applied Physics, Vol. 78, Issue 5
https://doi.org/10.1063/1.360060

Optical excitation of paramagnetic nitrogen in chemical vapor deposited diamond
journal, November 1996

Graeff, C. F. O.; Rohrer, E.; Nebel, C. E.
Applied Physics Letters, Vol. 69, Issue 21
https://doi.org/10.1063/1.117965

Nitrogen induced increase of growth rate in chemical vapor deposition of diamond
journal, February 1996

Müller‐Sebert, W.; Wörner, E.; Fuchs, F.
Applied Physics Letters, Vol. 68, Issue 6
https://doi.org/10.1063/1.116733

Suppression of surface cracks on (111) homoepitaxial diamond through impurity limitation by oxygen addition
journal, November 1998

Sakaguchi, Isao; Nishitani-Gamo, Mikka; Ping Loh, Kian
Applied Physics Letters, Vol. 73, Issue 18
https://doi.org/10.1063/1.122550

Oriented CVD diamond films: twin formation, structure and morphology
journal, April 1994

Wild, C.; Kohl, R.; Herres, N.
Diamond and Related Materials, Vol. 3, Issue 4-6
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Vacancy enhanced aggregation of nitrogen in diamond
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Collins, A. T.
Journal of Physics C: Solid State Physics, Vol. 13, Issue 14
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High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond
journal, September 2002

Isberg, Jan; Hammersberg, Johan; Johansson, Erik
Science, Vol. 297, Issue 5587, p. 1670-1672
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Ultrahard polycrystalline diamond from graphite
journal, February 2003

Irifune, Tetsuo; Kurio, Ayako; Sakamoto, Shizue
Nature, Vol. 421, Issue 6923
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Resonance Raman and photoluminescence investigations of micro-twins in homoepitaxially grown chemical vapor deposited diamond
journal, July 1997

Vohra, Yogesh K.; Israel, Andrew; Catledge, Shane A.
Applied Physics Letters, Vol. 71, Issue 3
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Confocal Raman spectroscopic observation of hexagonal diamond formation from dissolved carbon in nickel under chemical vapor deposition conditions
journal, August 1998

Nishitani-Gamo, Mikka; Sakaguchi, Isao; Loh, Kian Ping
Applied Physics Letters, Vol. 73, Issue 6
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journal, April 1993

Vitton, Jean-Pierre; Garenne, Jean-Jacques; Truchet, Sylvie
Diamond and Related Materials, Vol. 2, Issue 5-7
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Scanning Tunneling Microscopy Studies of Temperature-Dependent Etching of Diamond (100) by Atomic Hydrogen
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The effect of oxygen in diamond deposition by microwave plasma enhanced chemical vapor deposition
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HFCVD diamond grown with added nitrogen: film characterization and gas-phase composition studies
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Similar Records

Title: Ultratough CVD single crystal diamond and three dimensional growth thereof

Abstract

Citation Formats

Colour changes produced in natural brown diamonds by high-pressure, high-temperature treatment journal, March 2000

Effect of nitrogen on the growth of diamond films journal, July 1994

Moissanite: A Window for High-Pressure Experiments journal, October 2000

Very high growth rate chemical vapor deposition of single-crystal diamond journal, September 2002

Diamond nucleation on iridium buffer layers and subsequent textured growth: A route for the realization of single-crystal diamond films journal, January 2001

Red luminescence in phosphorous-doped chemically vapor deposited diamond journal, July 1997

Multiple twinning and nitrogen defect center in chemical vapor deposited homoepitaxial diamond journal, November 1999

The coalescence of [001] diamond grains heteroepitaxially grown on (001) silicon journal, December 1996

On the role of penetration twins in the morphological development of vapor-grown diamond films journal, July 1994

Growth of {100} textured diamond films by the addition of nitrogen journal, February 1996

Fracture of synthetic diamond journal, September 1995

Optical excitation of paramagnetic nitrogen in chemical vapor deposited diamond journal, November 1996

Nitrogen induced increase of growth rate in chemical vapor deposition of diamond journal, February 1996

Suppression of surface cracks on (111) homoepitaxial diamond through impurity limitation by oxygen addition journal, November 1998

Oriented CVD diamond films: twin formation, structure and morphology journal, April 1994

Vacancy enhanced aggregation of nitrogen in diamond journal, May 1980

High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond journal, September 2002

Ultrahard polycrystalline diamond from graphite journal, February 2003

Resonance Raman and photoluminescence investigations of micro-twins in homoepitaxially grown chemical vapor deposited diamond journal, July 1997

Confocal Raman spectroscopic observation of hexagonal diamond formation from dissolved carbon in nickel under chemical vapor deposition conditions journal, August 1998

High quality homoepitaxial growth of diamond films journal, April 1993

Scanning Tunneling Microscopy Studies of Temperature-Dependent Etching of Diamond (100) by Atomic Hydrogen journal, April 2001

Vapor growth of diamond on diamond and other surfaces journal, April 1981

The effect of oxygen in diamond deposition by microwave plasma enhanced chemical vapor deposition journal, November 1990

HFCVD diamond grown with added nitrogen: film characterization and gas-phase composition studies journal, July 1998

Diamond synthesis from gas phase in microwave plasma journal, August 1983

Colour changes produced in natural brown diamonds by high-pressure, high-temperature treatment
journal, March 2000

Effect of nitrogen on the growth of diamond films
journal, July 1994

Moissanite: A Window for High-Pressure Experiments
journal, October 2000

Very high growth rate chemical vapor deposition of single-crystal diamond
journal, September 2002

Diamond nucleation on iridium buffer layers and subsequent textured growth: A route for the realization of single-crystal diamond films
journal, January 2001

Red luminescence in phosphorous-doped chemically vapor deposited diamond
journal, July 1997

Multiple twinning and nitrogen defect center in chemical vapor deposited homoepitaxial diamond
journal, November 1999

The coalescence of [001] diamond grains heteroepitaxially grown on (001) silicon
journal, December 1996

On the role of penetration twins in the morphological development of vapor-grown diamond films
journal, July 1994

Growth of {100} textured diamond films by the addition of nitrogen
journal, February 1996

Fracture of synthetic diamond
journal, September 1995

Optical excitation of paramagnetic nitrogen in chemical vapor deposited diamond
journal, November 1996

Nitrogen induced increase of growth rate in chemical vapor deposition of diamond
journal, February 1996

Suppression of surface cracks on (111) homoepitaxial diamond through impurity limitation by oxygen addition
journal, November 1998

Oriented CVD diamond films: twin formation, structure and morphology
journal, April 1994

Vacancy enhanced aggregation of nitrogen in diamond
journal, May 1980

High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond
journal, September 2002

Ultrahard polycrystalline diamond from graphite
journal, February 2003

Resonance Raman and photoluminescence investigations of micro-twins in homoepitaxially grown chemical vapor deposited diamond
journal, July 1997

Confocal Raman spectroscopic observation of hexagonal diamond formation from dissolved carbon in nickel under chemical vapor deposition conditions
journal, August 1998

High quality homoepitaxial growth of diamond films
journal, April 1993

Scanning Tunneling Microscopy Studies of Temperature-Dependent Etching of Diamond (100) by Atomic Hydrogen
journal, April 2001

Vapor growth of diamond on diamond and other surfaces
journal, April 1981

The effect of oxygen in diamond deposition by microwave plasma enhanced chemical vapor deposition
journal, November 1990

HFCVD diamond grown with added nitrogen: film characterization and gas-phase composition studies
journal, July 1998

Diamond synthesis from gas phase in microwave plasma
journal, August 1983