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Title: Optical method for the characterization of laterally patterned samples in integrated circuits

Abstract

Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.

Inventors:
 [1]
  1. Barrington, RI
Issue Date:
Research Org.:
Brown University (Providence, RI)
Sponsoring Org.:
USDOE
OSTI Identifier:
988384
Patent Number(s):
7505154
Application Number:
12/072,841
Assignee:
Brown University (Providence, RI)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
DOE Contract Number:  
FG02-86ER45267
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Maris, Humphrey J. Optical method for the characterization of laterally patterned samples in integrated circuits. United States: N. p., 2009. Web.
Maris, Humphrey J. Optical method for the characterization of laterally patterned samples in integrated circuits. United States.
Maris, Humphrey J. Tue . "Optical method for the characterization of laterally patterned samples in integrated circuits". United States. https://www.osti.gov/servlets/purl/988384.
@article{osti_988384,
title = {Optical method for the characterization of laterally patterned samples in integrated circuits},
author = {Maris, Humphrey J},
abstractNote = {Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {3}
}

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