Polymer-assisted aqueous deposition of metal oxide films

Li, DeQuan; Jia, Quanxi

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Title: Polymer-assisted aqueous deposition of metal oxide films

Abstract

An organic solvent-free process for deposition of metal oxide thin films is presented. The process includes aqueous solutions of necessary metal precursors and an aqueous solution of a water-soluble polymer. After a coating operation, the resultant coating is fired at high temperatures to yield optical quality metal oxide thin films.

Inventors:

Li, DeQuan ^[1]; Jia, Quanxi ^[1]

Los Alamos, NM

Issue Date:: 2003-07-08

Research Org.:: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 985338

Patent Number(s):: 6589457

Application Number:: 09/629,116

Assignee:: The Regents of the University of California (Los Alamos, NM)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C18/1216 - {Metal oxides
C23C18/1245 - {Inorganic substrates other than metallic}
C23C18/1279 - {performed under reactive atmosphere, e.g. oxidising or reducing atmospheres}
C23C18/1295 - {with after-treatment of the deposited inorganic material}

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DOE Contract Number:: W-7405-ENG-36

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Li, DeQuan, and Jia, Quanxi. Polymer-assisted aqueous deposition of metal oxide films.  United States: N. p., 2003. 
        Web.

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                    Li, DeQuan, & Jia, Quanxi. Polymer-assisted aqueous deposition of metal oxide films.  United States.

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                    Li, DeQuan, and Jia, Quanxi. Tue .  
        "Polymer-assisted aqueous deposition of metal oxide films".  United States.  https://www.osti.gov/servlets/purl/985338.

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@article{osti_985338,

  title        = {Polymer-assisted aqueous deposition of metal oxide films},

  author       = {Li, DeQuan and Jia, Quanxi},

  abstractNote = {An organic solvent-free process for deposition of metal oxide thin films is presented. The process includes aqueous solutions of necessary metal precursors and an aqueous solution of a water-soluble polymer. After a coating operation, the resultant coating is fired at high temperatures to yield optical quality metal oxide thin films.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2003},

  month        = {7}

}

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Works referenced in this record:

Synthesis of nanophase PLZT (12/40/60) powder by PVA-solution technique
journal, January 1997

Saha, S. K.; Pramanik, P.
Nanostructured Materials, Vol. 8, Issue 1
https://doi.org/10.1016/S0965-9773(97)00062-7

Chemical Solution Deposition of Perovskite Thin Films
journal, November 1997

Schwartz, Robert W.
Chemistry of Materials, Vol. 9, Issue 11
https://doi.org/10.1021/cm970286f

Chemical Solution Routes to Single-Crystal Thin Films
journal, August 1996

Lange, F. F.
Science, Vol. 273, Issue 5277
https://doi.org/10.1126/science.273.5277.903

Preparation and Properties of Ferroelectric BaTiO ₃ Thin Films by Sol-Gel Process
journal, September 1993

Hayashi, Takashi; Ohji, Naoto; Hirohara, Koichiro
Japanese Journal of Applied Physics, Vol. 32, Issue Part 1, No. 9B
https://doi.org/10.1143/JJAP.32.4092

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Similar Records

Title: Polymer-assisted aqueous deposition of metal oxide films

Abstract

Citation Formats

Synthesis of nanophase PLZT (12/40/60) powder by PVA-solution technique journal, January 1997

Chemical Solution Deposition of Perovskite Thin Films journal, November 1997

Chemical Solution Routes to Single-Crystal Thin Films journal, August 1996

Preparation and Properties of Ferroelectric BaTiO 3 Thin Films by Sol-Gel Process journal, September 1993

Synthesis of nanophase PLZT (12/40/60) powder by PVA-solution technique
journal, January 1997

Chemical Solution Deposition of Perovskite Thin Films
journal, November 1997

Chemical Solution Routes to Single-Crystal Thin Films
journal, August 1996

Preparation and Properties of Ferroelectric BaTiO ₃ Thin Films by Sol-Gel Process
journal, September 1993