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Title: Microelectromechanical tunable inductor

Abstract

A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.

Inventors:
 [1];  [2];  [2];  [3]
  1. Norman, OK
  2. Albuquerque, NM
  3. (Albuquerque, NM)
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
985228
Patent Number(s):
7710232
Application Number:
11/746,147
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Stalford, Harold L, Hietala, Vincent M, Fleming, James G, and Fleming, legal representative, Carol. Microelectromechanical tunable inductor. United States: N. p., 2010. Web.
Stalford, Harold L, Hietala, Vincent M, Fleming, James G, & Fleming, legal representative, Carol. Microelectromechanical tunable inductor. United States.
Stalford, Harold L, Hietala, Vincent M, Fleming, James G, and Fleming, legal representative, Carol. Tue . "Microelectromechanical tunable inductor". United States. https://www.osti.gov/servlets/purl/985228.
@article{osti_985228,
title = {Microelectromechanical tunable inductor},
author = {Stalford, Harold L and Hietala, Vincent M and Fleming, James G and Fleming, legal representative, Carol},
abstractNote = {A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {5}
}

Works referenced in this record:

Self-assembling MEMS variable and fixed RF inductors
journal, January 2001


Tunable radio frequency MEMS inductors with thermal bimorph actuators
journal, September 2005


Out-of-plane high-Q inductors on low-resistance silicon
journal, December 2003