Microfabricated triggered vacuum switch
Abstract
A microfabricated vacuum switch is disclosed which includes a substrate upon which an anode, cathode and trigger electrode are located. A cover is sealed over the substrate under vacuum to complete the vacuum switch. In some embodiments of the present invention, a metal cover can be used in place of the trigger electrode on the substrate. Materials used for the vacuum switch are compatible with high vacuum, relatively high temperature processing. These materials include molybdenum, niobium, copper, tungsten, aluminum and alloys thereof for the anode and cathode. Carbon in the form of graphitic carbon, a diamond-like material, or carbon nanotubes can be used in the trigger electrode. Channels can be optionally formed in the substrate to mitigate against surface breakdown.
- Inventors:
-
- Tijeras, NM
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 985226
- Patent Number(s):
- 7714240
- Application Number:
- 11/231,915
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Roesler, Alexander W, Schare, Joshua M, and Bunch, Kyle. Microfabricated triggered vacuum switch. United States: N. p., 2010.
Web.
Roesler, Alexander W, Schare, Joshua M, & Bunch, Kyle. Microfabricated triggered vacuum switch. United States.
Roesler, Alexander W, Schare, Joshua M, and Bunch, Kyle. Tue .
"Microfabricated triggered vacuum switch". United States. https://www.osti.gov/servlets/purl/985226.
@article{osti_985226,
title = {Microfabricated triggered vacuum switch},
author = {Roesler, Alexander W and Schare, Joshua M and Bunch, Kyle},
abstractNote = {A microfabricated vacuum switch is disclosed which includes a substrate upon which an anode, cathode and trigger electrode are located. A cover is sealed over the substrate under vacuum to complete the vacuum switch. In some embodiments of the present invention, a metal cover can be used in place of the trigger electrode on the substrate. Materials used for the vacuum switch are compatible with high vacuum, relatively high temperature processing. These materials include molybdenum, niobium, copper, tungsten, aluminum and alloys thereof for the anode and cathode. Carbon in the form of graphitic carbon, a diamond-like material, or carbon nanotubes can be used in the trigger electrode. Channels can be optionally formed in the substrate to mitigate against surface breakdown.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 11 00:00:00 EDT 2010},
month = {Tue May 11 00:00:00 EDT 2010}
}
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