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Title: Polymer-assisted deposition of films

Abstract

A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.

Inventors:
 [1];  [1];  [1];  [1]
  1. Los Alamos, NM
Issue Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
985156
Patent Number(s):
7365118
Application Number:
US Patent Application 10/616,479
Assignee:
Los Alamos National Security, LLC (Los Alamos, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, and Lin, Yuan. Polymer-assisted deposition of films. United States: N. p., 2008. Web.
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, & Lin, Yuan. Polymer-assisted deposition of films. United States.
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, and Lin, Yuan. Tue . "Polymer-assisted deposition of films". United States. https://www.osti.gov/servlets/purl/985156.
@article{osti_985156,
title = {Polymer-assisted deposition of films},
author = {McCleskey, Thomas M and Burrell, Anthony K and Jia, Quanxi and Lin, Yuan},
abstractNote = {A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {4}
}

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Works referenced in this record:

Chemical Solution Deposition of Perovskite Thin Films
journal, November 1997


Chemical Solution Routes to Single-Crystal Thin Films
journal, August 1996