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Title: Gas sensor with attenuated drift characteristic

Abstract

A sensor with an attenuated drift characteristic, including a layer structure in which a sensing layer has a layer of diffusional barrier material on at least one of its faces. The sensor may for example be constituted as a hydrogen gas sensor including a palladium/yttrium layer structure formed on a micro-hotplate base, with a chromium barrier layer between the yttrium layer and the micro-hotplate, and with a tantalum barrier layer between the yttrium layer and an overlying palladium protective layer. The gas sensor is useful for detection of a target gas in environments susceptible to generation or incursion of such gas, and achieves substantial (e.g., >90%) reduction of signal drift from the gas sensor in extended operation, relative to a corresponding gas sensor lacking the diffusional barrier structure of the invention

Inventors:
 [1];  [2];  [2];  [3];  [1];  [1]
  1. Danbury, CT
  2. Bethel, CT
  3. Fairfield, CT
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
981830
Patent Number(s):
7370511
Application Number:
10/795,529
Assignee:
MST Technology GmbH (DE)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
FC36-99GO10451
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Chen, Ing-Shin, Chen, Philip S. H., Neuner, Jeffrey W, Welch, James, Hendrix, Bryan, and Dimeo, Jr., Frank. Gas sensor with attenuated drift characteristic. United States: N. p., 2008. Web.
Chen, Ing-Shin, Chen, Philip S. H., Neuner, Jeffrey W, Welch, James, Hendrix, Bryan, & Dimeo, Jr., Frank. Gas sensor with attenuated drift characteristic. United States.
Chen, Ing-Shin, Chen, Philip S. H., Neuner, Jeffrey W, Welch, James, Hendrix, Bryan, and Dimeo, Jr., Frank. Tue . "Gas sensor with attenuated drift characteristic". United States. https://www.osti.gov/servlets/purl/981830.
@article{osti_981830,
title = {Gas sensor with attenuated drift characteristic},
author = {Chen, Ing-Shin and Chen, Philip S. H. and Neuner, Jeffrey W and Welch, James and Hendrix, Bryan and Dimeo, Jr., Frank},
abstractNote = {A sensor with an attenuated drift characteristic, including a layer structure in which a sensing layer has a layer of diffusional barrier material on at least one of its faces. The sensor may for example be constituted as a hydrogen gas sensor including a palladium/yttrium layer structure formed on a micro-hotplate base, with a chromium barrier layer between the yttrium layer and the micro-hotplate, and with a tantalum barrier layer between the yttrium layer and an overlying palladium protective layer. The gas sensor is useful for detection of a target gas in environments susceptible to generation or incursion of such gas, and achieves substantial (e.g., >90%) reduction of signal drift from the gas sensor in extended operation, relative to a corresponding gas sensor lacking the diffusional barrier structure of the invention},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {5}
}

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