Gas sensor with attenuated drift characteristic
Abstract
A sensor with an attenuated drift characteristic, including a layer structure in which a sensing layer has a layer of diffusional barrier material on at least one of its faces. The sensor may for example be constituted as a hydrogen gas sensor including a palladium/yttrium layer structure formed on a micro-hotplate base, with a chromium barrier layer between the yttrium layer and the micro-hotplate, and with a tantalum barrier layer between the yttrium layer and an overlying palladium protective layer. The gas sensor is useful for detection of a target gas in environments susceptible to generation or incursion of such gas, and achieves substantial (e.g., >90%) reduction of signal drift from the gas sensor in extended operation, relative to a corresponding gas sensor lacking the diffusional barrier structure of the invention
- Inventors:
-
- Danbury, CT
- Bethel, CT
- Fairfield, CT
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 981830
- Patent Number(s):
- 7370511
- Application Number:
- 10/795,529
- Assignee:
- MST Technology GmbH (DE)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- FC36-99GO10451
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Chen, Ing-Shin, Chen, Philip S. H., Neuner, Jeffrey W, Welch, James, Hendrix, Bryan, and Dimeo, Jr., Frank. Gas sensor with attenuated drift characteristic. United States: N. p., 2008.
Web.
Chen, Ing-Shin, Chen, Philip S. H., Neuner, Jeffrey W, Welch, James, Hendrix, Bryan, & Dimeo, Jr., Frank. Gas sensor with attenuated drift characteristic. United States.
Chen, Ing-Shin, Chen, Philip S. H., Neuner, Jeffrey W, Welch, James, Hendrix, Bryan, and Dimeo, Jr., Frank. Tue .
"Gas sensor with attenuated drift characteristic". United States. https://www.osti.gov/servlets/purl/981830.
@article{osti_981830,
title = {Gas sensor with attenuated drift characteristic},
author = {Chen, Ing-Shin and Chen, Philip S. H. and Neuner, Jeffrey W and Welch, James and Hendrix, Bryan and Dimeo, Jr., Frank},
abstractNote = {A sensor with an attenuated drift characteristic, including a layer structure in which a sensing layer has a layer of diffusional barrier material on at least one of its faces. The sensor may for example be constituted as a hydrogen gas sensor including a palladium/yttrium layer structure formed on a micro-hotplate base, with a chromium barrier layer between the yttrium layer and the micro-hotplate, and with a tantalum barrier layer between the yttrium layer and an overlying palladium protective layer. The gas sensor is useful for detection of a target gas in environments susceptible to generation or incursion of such gas, and achieves substantial (e.g., >90%) reduction of signal drift from the gas sensor in extended operation, relative to a corresponding gas sensor lacking the diffusional barrier structure of the invention},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 13 00:00:00 EDT 2008},
month = {Tue May 13 00:00:00 EDT 2008}
}