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Title: Thermal microphotonic sensor and sensor array

Abstract

A thermal microphotonic sensor is disclosed for detecting infrared radiation using heat generated by the infrared radiation to shift the resonant frequency of an optical resonator (e.g. a ring resonator) to which the heat is coupled. The shift in the resonant frequency can be determined from light in an optical waveguide which is evanescently coupled to the optical resonator. An infrared absorber can be provided on the optical waveguide either as a coating or as a plate to aid in absorption of the infrared radiation. In some cases, a vertical resonant cavity can be formed about the infrared absorber to further increase the absorption of the infrared radiation. The sensor can be formed as a single device, or as an array for imaging the infrared radiation.

Inventors:
 [1];  [2];  [1];  [1]
  1. Albuquerque, NM
  2. Tijeras, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Org.:
USDOE
OSTI Identifier:
978697
Patent Number(s):
7,667,200
Application Number:
11/950,821
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Watts, Michael R, Shaw, Michael J, Nielson, Gregory N, and Lentine, Anthony L. Thermal microphotonic sensor and sensor array. United States: N. p., 2010. Web.
Watts, Michael R, Shaw, Michael J, Nielson, Gregory N, & Lentine, Anthony L. Thermal microphotonic sensor and sensor array. United States.
Watts, Michael R, Shaw, Michael J, Nielson, Gregory N, and Lentine, Anthony L. Tue . "Thermal microphotonic sensor and sensor array". United States. https://www.osti.gov/servlets/purl/978697.
@article{osti_978697,
title = {Thermal microphotonic sensor and sensor array},
author = {Watts, Michael R and Shaw, Michael J and Nielson, Gregory N and Lentine, Anthony L},
abstractNote = {A thermal microphotonic sensor is disclosed for detecting infrared radiation using heat generated by the infrared radiation to shift the resonant frequency of an optical resonator (e.g. a ring resonator) to which the heat is coupled. The shift in the resonant frequency can be determined from light in an optical waveguide which is evanescently coupled to the optical resonator. An infrared absorber can be provided on the optical waveguide either as a coating or as a plate to aid in absorption of the infrared radiation. In some cases, a vertical resonant cavity can be formed about the infrared absorber to further increase the absorption of the infrared radiation. The sensor can be formed as a single device, or as an array for imaging the infrared radiation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {2}
}

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Works referenced in this record:

Evaluation of thermal parameters of bolometer devices
journal, March 2002

  • Neuzil, P.; Mei, T.
  • Applied Physics Letters, Vol. 80, Issue 10
  • DOI: 10.1063/1.1458686

Ultra-high-Q toroid microcavity on a chip
journal, February 2003

  • Armani, D. K.; Kippenberg, T. J.; Spillane, S. M.
  • Nature, Vol. 421, Issue 6926, p. 925-928
  • DOI: 10.1038/nature01371

Fabrication techniques for low-loss silicon nitride waveguides
conference, January 2005

  • Shaw, Michael J.; Guo, Junpeng; Vawter, Gregory A.
  • MOEMS-MEMS Micro & Nanofabrication, SPIE Proceedings
  • DOI: 10.1117/12.588828

Uncooled IR imaging array based on quartz microresonators
journal, June 1996

  • Vig, J. R.; Filler, R. L.; Kim, Y.
  • Journal of Microelectromechanical Systems, Vol. 5, Issue 2
  • DOI: 10.1109/84.506201

Performance of 320 x 240 uncooled IRFPA with SOI diode detectors
conference, December 2000

  • Ishikawa, Tomohiro; Ueno, Masashi; Nakaki, Yoshiyuki
  • International Symposium on Optical Science and Technology, SPIE Proceedings
  • DOI: 10.1117/12.409857

Thermal Microphotonic Focal Plane Array (TM-FPA) for Uncooled High Sensitivity Thermal Imaging
conference, May 2007

  • Watts, Michael R.; Shaw, Michael J.; Nielson, Gregory N.
  • CLEO 2007, 2007 Conference on Lasers and Electro-Optics (CLEO)
  • DOI: 10.1109/CLEO.2007.4453123

Heavy water detection using ultra-high-Q microcavities
journal, January 2006

  • Armani, Andrea M.; Vahala, Kerry J.
  • Optics Letters, Vol. 31, Issue 12, p. 1896-1898
  • DOI: 10.1364/OL.31.001896

Experimental results on a quartz microresonator IR sensor
conference, January 1997

  • Rim, Y.; Vig, J. R.
  • 1997 IEEE Ultrasonics Symposium An International Symposium, 1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)
  • DOI: 10.1109/ULTSYM.1997.663060

High-Q microring resonator for biochemical sensors
conference, March 2005

  • Guo, Junpeng; Shaw, Michael J.; Vawter, G. A.
  • Integrated Optoelectronic Devices 2005, SPIE Proceedings
  • DOI: 10.1117/12.589467