Formation of interconnections to microfluidic devices
Abstract
A method is disclosed to form external interconnections to a microfluidic device for coupling of a fluid or light or both into a microchannel of the device. This method can be used to form optical or fluidic interconnections to microchannels previously formed on a substrate, or to form both the interconnections and microchannels during the same process steps. The optical and fluidic interconnections are formed parallel to the plane of the substrate, and are fluid tight.
- Inventors:
-
- Los Lunas, NM
- Edgewood, NM
- Tijeras, NM
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 973154
- Patent Number(s):
- 6599436
- Application Number:
- 10/016,956
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Matzke, Carolyn M, Ashby, Carol I. H., and Griego, Leonardo. Formation of interconnections to microfluidic devices. United States: N. p., 2003.
Web.
Matzke, Carolyn M, Ashby, Carol I. H., & Griego, Leonardo. Formation of interconnections to microfluidic devices. United States.
Matzke, Carolyn M, Ashby, Carol I. H., and Griego, Leonardo. Tue .
"Formation of interconnections to microfluidic devices". United States. https://www.osti.gov/servlets/purl/973154.
@article{osti_973154,
title = {Formation of interconnections to microfluidic devices},
author = {Matzke, Carolyn M and Ashby, Carol I. H. and Griego, Leonardo},
abstractNote = {A method is disclosed to form external interconnections to a microfluidic device for coupling of a fluid or light or both into a microchannel of the device. This method can be used to form optical or fluidic interconnections to microchannels previously formed on a substrate, or to form both the interconnections and microchannels during the same process steps. The optical and fluidic interconnections are formed parallel to the plane of the substrate, and are fluid tight.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {7}
}