skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom

Abstract

A nanomechanical near-field grating device is disclosed which includes two sub-gratings vertically spaced by a distance less than or equal to an operating wavelength. Each sub-grating includes a plurality of line-elements spaced apart by a distance less than or equal to the operating wavelength. A light source (e.g., a VCSEL or LED) can provide light at the operating wavelength for operation of the device. The device can operate as an active grating, with the intensity of a reflected or transmitted portion of the light varying as the relative positions of the sub-gratings are controlled by an actuator. The device can also operate as a passive grating, with the relative positions of the sub-gratings changing in response to an environmentally-induced force due to acceleration, impact, shock, vibration, gravity, etc. Since the device can be adapted to sense an acceleration that is directed laterally or vertically, a plurality of devices can be located on a common substrate to form a multi-axis acceleration sensor.

Inventors:
 [1];  [2];  [1]
  1. Albuquerque, NM
  2. Corrales, NM
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
970551
Patent Number(s):
7339738
Application Number:
11/088,313
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Carr, Dustin Wade, Bogart, Gregory Robert, and Keeler, Bianca E. N.. Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom. United States: N. p., 2008. Web.
Carr, Dustin Wade, Bogart, Gregory Robert, & Keeler, Bianca E. N.. Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom. United States.
Carr, Dustin Wade, Bogart, Gregory Robert, and Keeler, Bianca E. N.. Tue . "Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom". United States. https://www.osti.gov/servlets/purl/970551.
@article{osti_970551,
title = {Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom},
author = {Carr, Dustin Wade and Bogart, Gregory Robert and Keeler, Bianca E. N.},
abstractNote = {A nanomechanical near-field grating device is disclosed which includes two sub-gratings vertically spaced by a distance less than or equal to an operating wavelength. Each sub-grating includes a plurality of line-elements spaced apart by a distance less than or equal to the operating wavelength. A light source (e.g., a VCSEL or LED) can provide light at the operating wavelength for operation of the device. The device can operate as an active grating, with the intensity of a reflected or transmitted portion of the light varying as the relative positions of the sub-gratings are controlled by an actuator. The device can also operate as a passive grating, with the relative positions of the sub-gratings changing in response to an environmentally-induced force due to acceleration, impact, shock, vibration, gravity, etc. Since the device can be adapted to sense an acceleration that is directed laterally or vertically, a plurality of devices can be located on a common substrate to form a multi-axis acceleration sensor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {3}
}

Patent:

Save / Share:

Works referenced in this record:

Laterally deformable optical NEMS grating transducers for inertial sensing applications
conference, January 2005


Laterally deformable nanomechanical zeroth-order gratings: anomalous diffraction studied by rigorous coupled-wave analysis
journal, January 2003


Deformable grating optical modulator
journal, January 1992


Thick polysilicon surface-micromachined optically sensed accelerometer
conference, March 1999


Measurement of a laterally deformable optical MEMS grating transducer
conference, January 2004


Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer
journal, January 2004