Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates

Branagan, Daniel J; Hyde, Timothy A; Fincke, James R

Title: Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates

Abstract

The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.

Inventors:

Branagan, Daniel J ^[1]; Hyde, Timothy A ^[1]; Fincke, James R ^[2]

Idaho Falls, ID
Los Alamos, NM

Issue Date:: 2008-03-11

Research Org.:: Idaho National Lab. (INL), Idaho Falls, ID (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 970494

Patent Number(s):: 7341765

Application Number:: 10/918,287

Assignee:: Battelle Energy Alliance, LLC (Idaho Falls, ID)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C - CHEMISTRY C22 - METALLURGY C22C - ALLOYS

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/5806 - {Thermal treatment}

C - CHEMISTRY C22 - METALLURGY C22C - ALLOYS
C22C33/00 - Making ferrous alloys

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B7/0029 - {Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025}

C - CHEMISTRY C22 - METALLURGY C22C - ALLOYS
C22C45/02 - with iron as the major constituent
C22C33/003 - {making amorphous alloys}

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/16 - on metallic substrates or on substrates of boron or silicon

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/263 - Coating layer not in excess of 5 mils thick or equivalent
Y10T428/31 - Surface property or characteristic of web, sheet or block

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C1/00674 - {Treatments for improving wear resistance}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/24917 - including metal layer

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DOE Contract Number:: AC07-99ID13727

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Branagan, Daniel J, Hyde, Timothy A, and Fincke, James R. Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates.  United States: N. p., 2008. 
        Web.

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                    Branagan, Daniel J, Hyde, Timothy A, & Fincke, James R. Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates.  United States.

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                    Branagan, Daniel J, Hyde, Timothy A, and Fincke, James R. Tue .  
        "Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates".  United States.  https://www.osti.gov/servlets/purl/970494.

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@article{osti_970494,

  title        = {Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates},

  author       = {Branagan, Daniel J and Hyde, Timothy A and Fincke, James R},

  abstractNote = {The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2008},

  month        = {3}

}

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Works referenced in this record:

Enhanced corrosion resistance in Nd15Fe77B8 by laser surface amorphization
journal, March 1989

Armstrong, J. V.; Coey, J. M. D.; Lunney, J. G.
Hyperfine Interactions, Vol. 46, Issue 1-4
https://doi.org/10.1007/BF02398232

Effect of group IV elements on the cutting characteristics of Ti(C,N) cermet tools and reliability analysis
journal, July 2005

Kwon, Won Tae; Park, June Seuk; Kang, Shinhoo
Journal of Materials Processing Technology, Vol. 166, Issue 1
https://doi.org/10.1016/j.jmatprotec.2004.06.009

Time-temperature-transformation diagram of a highly processable metallic glass
journal, May 1994

Peker, A.; Johnson, W. L.
Materials Science and Engineering: A, Vol. 179-180
https://doi.org/10.1016/0921-5093(94)90187-2

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Similar Records

Title: Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates

Abstract

Citation Formats

Enhanced corrosion resistance in Nd15Fe77B8 by laser surface amorphization journal, March 1989

Effect of group IV elements on the cutting characteristics of Ti(C,N) cermet tools and reliability analysis journal, July 2005

Time-temperature-transformation diagram of a highly processable metallic glass journal, May 1994

Enhanced corrosion resistance in Nd15Fe77B8 by laser surface amorphization
journal, March 1989

Effect of group IV elements on the cutting characteristics of Ti(C,N) cermet tools and reliability analysis
journal, July 2005

Time-temperature-transformation diagram of a highly processable metallic glass
journal, May 1994