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Title: Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates

Abstract

The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.

Inventors:
 [1];  [1];  [2]
  1. Idaho Falls, ID
  2. Los Alamos, NM
Issue Date:
Research Org.:
Idaho National Lab. (INL), Idaho Falls, ID (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
970494
Patent Number(s):
7341765
Application Number:
10/918,287
Assignee:
Battelle Energy Alliance, LLC (Idaho Falls, ID)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C - CHEMISTRY C22 - METALLURGY C22C - ALLOYS
DOE Contract Number:  
AC07-99ID13727
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Branagan, Daniel J, Hyde, Timothy A, and Fincke, James R. Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates. United States: N. p., 2008. Web.
Branagan, Daniel J, Hyde, Timothy A, & Fincke, James R. Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates. United States.
Branagan, Daniel J, Hyde, Timothy A, and Fincke, James R. Tue . "Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates". United States. https://www.osti.gov/servlets/purl/970494.
@article{osti_970494,
title = {Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates},
author = {Branagan, Daniel J and Hyde, Timothy A and Fincke, James R},
abstractNote = {The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {3}
}

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Works referenced in this record:

Enhanced corrosion resistance in Nd15Fe77B8 by laser surface amorphization
journal, March 1989


Effect of group IV elements on the cutting characteristics of Ti(C,N) cermet tools and reliability analysis
journal, July 2005


Time-temperature-transformation diagram of a highly processable metallic glass
journal, May 1994