Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates
Abstract
The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.
- Inventors:
-
- Idaho Falls, ID
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Idaho National Laboratory (INL), Idaho Falls, ID (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 970494
- Patent Number(s):
- 7341765
- Application Number:
- 10/918,287
- Assignee:
- Battelle Energy Alliance, LLC (Idaho Falls, ID)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- DOE Contract Number:
- AC07-99ID13727
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Branagan, Daniel J, Hyde, Timothy A, and Fincke, James R. Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates. United States: N. p., 2008.
Web.
Branagan, Daniel J, Hyde, Timothy A, & Fincke, James R. Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates. United States.
Branagan, Daniel J, Hyde, Timothy A, and Fincke, James R. Tue .
"Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates". United States. https://www.osti.gov/servlets/purl/970494.
@article{osti_970494,
title = {Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates},
author = {Branagan, Daniel J and Hyde, Timothy A and Fincke, James R},
abstractNote = {The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 11 00:00:00 EDT 2008},
month = {Tue Mar 11 00:00:00 EDT 2008}
}
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