Surface control alloy substrates and methods of manufacture therefor
Abstract
Methods and articles for controlling the surface of an alloy substrate for deposition of an epitaxial layer. The invention includes the use of an intermediate layer to stabilize the substrate surface against oxidation for subsequent deposition of an epitaxial layer.
- Inventors:
-
- Mendon, MA
- Marlborough, MA
- Framingham, MA
- Coventry, RI
- Malden, MA
- Westborough, MA
- Brookline, MA
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 968996
- Patent Number(s):
- 6730410
- Application Number:
- 09/616,570
- Assignee:
- Electronic Power Research Institute, Incorporated (Palo Alto, CA); The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Fritzemeier, Leslie G, Li, Qi, Rupich, Martin W, Thompson, Elliott D, Siegal, Edward J, Thieme, Cornelis Leo Hans, Annavarapu, Suresh, Arendt, Paul N, and Foltyn, Stephen R. Surface control alloy substrates and methods of manufacture therefor. United States: N. p., 2004.
Web.
Fritzemeier, Leslie G, Li, Qi, Rupich, Martin W, Thompson, Elliott D, Siegal, Edward J, Thieme, Cornelis Leo Hans, Annavarapu, Suresh, Arendt, Paul N, & Foltyn, Stephen R. Surface control alloy substrates and methods of manufacture therefor. United States.
Fritzemeier, Leslie G, Li, Qi, Rupich, Martin W, Thompson, Elliott D, Siegal, Edward J, Thieme, Cornelis Leo Hans, Annavarapu, Suresh, Arendt, Paul N, and Foltyn, Stephen R. Tue .
"Surface control alloy substrates and methods of manufacture therefor". United States. https://www.osti.gov/servlets/purl/968996.
@article{osti_968996,
title = {Surface control alloy substrates and methods of manufacture therefor},
author = {Fritzemeier, Leslie G and Li, Qi and Rupich, Martin W and Thompson, Elliott D and Siegal, Edward J and Thieme, Cornelis Leo Hans and Annavarapu, Suresh and Arendt, Paul N and Foltyn, Stephen R},
abstractNote = {Methods and articles for controlling the surface of an alloy substrate for deposition of an epitaxial layer. The invention includes the use of an intermediate layer to stabilize the substrate surface against oxidation for subsequent deposition of an epitaxial layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {5}
}
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