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Title: Backfilled, self-assembled monolayers and methods of making same

Abstract

Backfilled, self-assembled monolayers and methods of making the same are disclosed. The self-assembled monolayer comprises at least one functional organosilane species and a substantially random dispersion of at least one backfilling organosilane species among the functional organosilane species, wherein the functional and backfilling organosilane species have been sequentially deposited on a substrate. The method comprises depositing sequentially a first organosilane species followed by a backfilling organosilane species, and employing a relaxation agent before or during deposition of the backfilling organosilane species, wherein the first and backfilling organosilane species are substantially randomly dispersed on a substrate.

Inventors:
 [1];  [2];  [3];  [4];  [2];  [5];  [6]
  1. Kennewick, WA
  2. Richland, WA
  3. Benton City, WA
  4. Sequim, WA
  5. Raleigh, NC
  6. West Richland, WA
Issue Date:
Research Org.:
Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
968972
Patent Number(s):
7553547
Application Number:
11/315,646
Assignee:
Battelle Memorial Institute (Richland, WA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
AC05-76RL01830
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Fryxell, Glen E, Zemanian, Thomas S, Addleman, R Shane, Aardahl, Christopher L, Zheng, Feng, Busche, Brad, and Egorov, Oleg B. Backfilled, self-assembled monolayers and methods of making same. United States: N. p., 2009. Web.
Fryxell, Glen E, Zemanian, Thomas S, Addleman, R Shane, Aardahl, Christopher L, Zheng, Feng, Busche, Brad, & Egorov, Oleg B. Backfilled, self-assembled monolayers and methods of making same. United States.
Fryxell, Glen E, Zemanian, Thomas S, Addleman, R Shane, Aardahl, Christopher L, Zheng, Feng, Busche, Brad, and Egorov, Oleg B. Tue . "Backfilled, self-assembled monolayers and methods of making same". United States. https://www.osti.gov/servlets/purl/968972.
@article{osti_968972,
title = {Backfilled, self-assembled monolayers and methods of making same},
author = {Fryxell, Glen E and Zemanian, Thomas S and Addleman, R Shane and Aardahl, Christopher L and Zheng, Feng and Busche, Brad and Egorov, Oleg B},
abstractNote = {Backfilled, self-assembled monolayers and methods of making the same are disclosed. The self-assembled monolayer comprises at least one functional organosilane species and a substantially random dispersion of at least one backfilling organosilane species among the functional organosilane species, wherein the functional and backfilling organosilane species have been sequentially deposited on a substrate. The method comprises depositing sequentially a first organosilane species followed by a backfilling organosilane species, and employing a relaxation agent before or during deposition of the backfilling organosilane species, wherein the first and backfilling organosilane species are substantially randomly dispersed on a substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 30 00:00:00 EDT 2009},
month = {Tue Jun 30 00:00:00 EDT 2009}
}

Works referenced in this record:

Deposition of Self-Assembled Monolayers in Mesoporous Silica from Supercritical Fluids
journal, December 2001


Micropatterning organosilane self-assembled monolayers with plasma etching and backfilling techniques
journal, January 2005

  • Harant, Adam W.; Whipple, Stephen G.; Douglas, Kenneth
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 2
  • https://doi.org/10.1116/1.1861041

Binary self-assembled monolayers as prepared by successive adsorption of alkyltrichlorosilanes
journal, December 1993


Functionalized Monolayers on Ordered Mesoporous Supports
journal, May 1997