Extended-range tiltable micromirror

Allen, James J; Wiens, Gloria J; Bronson, Jessica R

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Title: Extended-range tiltable micromirror

Abstract

A tiltable micromirror device is disclosed in which a micromirror is suspended by a progressive linkage with an electrostatic actuator (e.g. a vertical comb actuator or a capacitive plate electrostatic actuator) being located beneath the micromirror. The progressive linkage includes a pair of torsion springs which are connected together to operate similar to a four-bar linkage with spring joints. The progressive linkage provides a non-linear spring constant which can allow the micromirror to be tilted at any angle within its range substantially free from any electrostatic instability or hysteretic behavior.

Inventors:

Allen, James J ^[1]; Wiens, Gloria J ^[2]; Bronson, Jessica R ^[3]

Albuquerque, NM
Newberry, FL
Gainesville, FL

Issue Date:: 2009-05-05

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 963810

Patent Number(s):: 7529016

Application Number:: 11/494,223

Assignee:: Allen, James J. (Albuquerque, NM); Wiens, Gloria J. (Newberry, FL); Bronson, Jessica R. (Gainesville, FL)

Patent Classifications (CPCs):: G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B26/0841 - {the reflecting element being moved or deformed by electrostatic means}

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION

Citation Formats


                    Allen, James J, Wiens, Gloria J, and Bronson, Jessica R. Extended-range tiltable micromirror.  United States: N. p., 2009. 
        Web.

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                    Allen, James J, Wiens, Gloria J, & Bronson, Jessica R. Extended-range tiltable micromirror.  United States.

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                    Allen, James J, Wiens, Gloria J, and Bronson, Jessica R. Tue .  
        "Extended-range tiltable micromirror".  United States.  https://www.osti.gov/servlets/purl/963810.

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@article{osti_963810,

  title        = {Extended-range tiltable micromirror},

  author       = {Allen, James J and Wiens, Gloria J and Bronson, Jessica R},

  abstractNote = {A tiltable micromirror device is disclosed in which a micromirror is suspended by a progressive linkage with an electrostatic actuator (e.g. a vertical comb actuator or a capacitive plate electrostatic actuator) being located beneath the micromirror. The progressive linkage includes a pair of torsion springs which are connected together to operate similar to a four-bar linkage with spring joints. The progressive linkage provides a non-linear spring constant which can allow the micromirror to be tilted at any angle within its range substantially free from any electrostatic instability or hysteretic behavior.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2009},

  month        = {5}

}

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Works referenced in this record:

A Monolithic Micro Four-Bar Mechanism With Flexure Hinges
conference, March 2008

Lee, Sang-Joon John; Yee, Raymond K.; Kelley, Reginald
ASME 2004 International Mechanical Engineering Congress and Exposition, Microelectromechanical Systems
https://doi.org/10.1115/IMECE2004-62263

Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor
journal, October 2001

Kyynäräinen, J. M.; Oja, A. S.; Seppä, H.
Analog Integrated Circuits and Signal Processing, Vol. 29, Issue 1/2, p. 61-70
https://doi.org/10.1023/A:1011230330035

Travel range extension of a MEMS electrostatic microactuator
journal, January 2005

Piyabongkarn, D.; Sun, Y.; Rajamani, R.
IEEE Transactions on Control Systems Technology, Vol. 13, Issue 1
https://doi.org/10.1109/TCST.2004.838572

Extending the travel range of analog-tuned electrostatic actuators
journal, January 1999

Hung, E. S.; Senturia, S. D.
Journal of Microelectromechanical Systems, Vol. 8, Issue 4
https://doi.org/10.1109/84.809065

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage
conference, June 2008

Bronson, Jessica R.; Wiens, Gloria J.; Allen, James J.
ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Volume 7: 29th Mechanisms and Robotics Conference, Parts A and B
https://doi.org/10.1115/DETC2005-84217

Nonlinear flexures for stable deflection of an electrostatically actuated micromirror
conference, September 1997

Burns, David M.; Bright, Victor M.
Micromachining and Microfabrication, SPIE Proceedings
https://doi.org/10.1117/12.284560

Pivoting micromirror designs for large orientation angles
conference, August 2000

Garcia, Ernest J.
Micromachining and Microfabrication, SPIE Proceedings
https://doi.org/10.1117/12.396480

Self-assembly technique for MEMS vertical comb electrostatic actuator
journal, January 2005

Isamoto, K.; Makino, T.; Moroswa, A.
IEICE Electronics Express, Vol. 2, Issue 9
https://doi.org/10.1587/elex.2.311

Electrostatic micromechanical actuator with extended range of travel
journal, September 2000

Chan, E. K.; Dutton, R. W.
Journal of Microelectromechanical Systems, Vol. 9, Issue 3
https://doi.org/10.1109/84.870058

Stabilization of electrostatically actuated mechanical devices
conference, January 1997

Seeger, J. I.; Crary, S. B.
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
https://doi.org/10.1109/SENSOR.1997.635402

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Similar Records

Title: Extended-range tiltable micromirror

Abstract

Citation Formats

A Monolithic Micro Four-Bar Mechanism With Flexure Hinges conference, March 2008

Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor journal, October 2001

Travel range extension of a MEMS electrostatic microactuator journal, January 2005

Extending the travel range of analog-tuned electrostatic actuators journal, January 1999

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage conference, June 2008

Nonlinear flexures for stable deflection of an electrostatically actuated micromirror conference, September 1997

Pivoting micromirror designs for large orientation angles conference, August 2000

Self-assembly technique for MEMS vertical comb electrostatic actuator journal, January 2005

Electrostatic micromechanical actuator with extended range of travel journal, September 2000

Stabilization of electrostatically actuated mechanical devices conference, January 1997

A Monolithic Micro Four-Bar Mechanism With Flexure Hinges
conference, March 2008

Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor
journal, October 2001

Travel range extension of a MEMS electrostatic microactuator
journal, January 2005

Extending the travel range of analog-tuned electrostatic actuators
journal, January 1999

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage
conference, June 2008

Nonlinear flexures for stable deflection of an electrostatically actuated micromirror
conference, September 1997

Pivoting micromirror designs for large orientation angles
conference, August 2000

Self-assembly technique for MEMS vertical comb electrostatic actuator
journal, January 2005

Electrostatic micromechanical actuator with extended range of travel
journal, September 2000

Stabilization of electrostatically actuated mechanical devices
conference, January 1997