skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: System and method for floating-substrate passive voltage contrast

Abstract

A passive voltage contrast (PVC) system and method are disclosed for analyzing ICs to locate defects and failure mechanisms. During analysis a device side of a semiconductor die containing the IC is maintained in an electrically-floating condition without any ground electrical connection while a charged particle beam is scanned over the device side. Secondary particle emission from the device side of the IC is detected to form an image of device features, including electrical vias connected to transistor gates or to other structures in the IC. A difference in image contrast allows the defects or failure mechanisms be pinpointed. Varying the scan rate can, in some instances, produce an image reversal to facilitate precisely locating the defects or failure mechanisms in the IC. The system and method are useful for failure analysis of ICs formed on substrates (e.g. bulk semiconductor substrates and SOI substrates) and other types of structures.

Inventors:
 [1];  [2];  [1];  [3];  [1];  [1]
  1. Albuquerque, NM
  2. (Albuquerque, NM)
  3. Placitas, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Org.:
USDOE
OSTI Identifier:
963794
Patent Number(s):
7,525,325
Application Number:
11/640,720
Assignee:
Sandia Corporation (Alburquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Jenkins, Mark W, Cole, Jr., Edward I., Tangyunyong, Paiboon, Soden, Jerry M, Walraven, Jeremy A, and Pimentel, Alejandro A. System and method for floating-substrate passive voltage contrast. United States: N. p., 2009. Web.
Jenkins, Mark W, Cole, Jr., Edward I., Tangyunyong, Paiboon, Soden, Jerry M, Walraven, Jeremy A, & Pimentel, Alejandro A. System and method for floating-substrate passive voltage contrast. United States.
Jenkins, Mark W, Cole, Jr., Edward I., Tangyunyong, Paiboon, Soden, Jerry M, Walraven, Jeremy A, and Pimentel, Alejandro A. Tue . "System and method for floating-substrate passive voltage contrast". United States. https://www.osti.gov/servlets/purl/963794.
@article{osti_963794,
title = {System and method for floating-substrate passive voltage contrast},
author = {Jenkins, Mark W and Cole, Jr., Edward I. and Tangyunyong, Paiboon and Soden, Jerry M and Walraven, Jeremy A and Pimentel, Alejandro A},
abstractNote = {A passive voltage contrast (PVC) system and method are disclosed for analyzing ICs to locate defects and failure mechanisms. During analysis a device side of a semiconductor die containing the IC is maintained in an electrically-floating condition without any ground electrical connection while a charged particle beam is scanned over the device side. Secondary particle emission from the device side of the IC is detected to form an image of device features, including electrical vias connected to transistor gates or to other structures in the IC. A difference in image contrast allows the defects or failure mechanisms be pinpointed. Varying the scan rate can, in some instances, produce an image reversal to facilitate precisely locating the defects or failure mechanisms in the IC. The system and method are useful for failure analysis of ICs formed on substrates (e.g. bulk semiconductor substrates and SOI substrates) and other types of structures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {4}
}

Patent:

Save / Share: