Apparatus and system for multivariate spectral analysis
Abstract
An apparatus and system for determining the properties of a sample from measured spectral data collected from the sample by performing a method of multivariate spectral analysis. The method can include: generating a twodimensional matrix A containing measured spectral data; providing a weighted spectral data matrix D by performing a weighting operation on matrix A; factoring D into the product of two matrices, C and S.sup.T, by performing a constrained alternating leastsquares analysis of D=CS.sup.T, where C is a concentration intensity matrix and S is a spectral shapes matrix; unweighting C and S by applying the inverse of the weighting used previously; and determining the properties of the sample by inspecting C and S. This method can be used by a spectrum analyzer to process Xray spectral data generated by a spectral analysis system that can include a Scanning Electron Microscope (SEM) with an Energy Dispersive Detector and Pulse Height Analyzer.
 Inventors:

 (Albuquerque, NM)
 Issue Date:
 Research Org.:
 Sandia National Laboratories (SNLNM), Albuquerque, NM
 Sponsoring Org.:
 USDOE
 OSTI Identifier:
 958090
 Patent Number(s):
 6,584,413
 Application Number:
 09/872,740
 Assignee:
 Sandia Corporation (Albuquerque, NM) ALO
 DOE Contract Number:
 AC0494AL85000
 Resource Type:
 Patent
 Country of Publication:
 United States
 Language:
 English
Citation Formats
Keenan, Michael R., and Kotula, Paul G. Apparatus and system for multivariate spectral analysis. United States: N. p., 2003.
Web.
Keenan, Michael R., & Kotula, Paul G. Apparatus and system for multivariate spectral analysis. United States.
Keenan, Michael R., and Kotula, Paul G. Tue .
"Apparatus and system for multivariate spectral analysis". United States. https://www.osti.gov/servlets/purl/958090.
@article{osti_958090,
title = {Apparatus and system for multivariate spectral analysis},
author = {Keenan, Michael R. and Kotula, Paul G.},
abstractNote = {An apparatus and system for determining the properties of a sample from measured spectral data collected from the sample by performing a method of multivariate spectral analysis. The method can include: generating a twodimensional matrix A containing measured spectral data; providing a weighted spectral data matrix D by performing a weighting operation on matrix A; factoring D into the product of two matrices, C and S.sup.T, by performing a constrained alternating leastsquares analysis of D=CS.sup.T, where C is a concentration intensity matrix and S is a spectral shapes matrix; unweighting C and S by applying the inverse of the weighting used previously; and determining the properties of the sample by inspecting C and S. This method can be used by a spectrum analyzer to process Xray spectral data generated by a spectral analysis system that can include a Scanning Electron Microscope (SEM) with an Energy Dispersive Detector and Pulse Height Analyzer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {6}
}