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Title: Method and Apparatus for Creating a Topography at a Surface

Abstract

Methods and apparatus whereby an optical interferometer is utilized to monitor and provide feedback control to an integrated energetic particle column, to create desired topographies, including the depth, shape and/or roughness of features, at a surface of a specimen. Energetic particle columns can direct energetic species including, ions, photons and/or neutral particles to a surface to create features having in-plane dimensions on the order of 1 micron, and a height or depth on the order of 1 nanometer. Energetic processes can include subtractive processes such as sputtering, ablation, focused ion beam milling and, additive processes, such as energetic beam induced chemical vapor deposition. The integration of interferometric methods with processing by energetic species offers the ability to create desired topographies at surfaces, including planar and curved shapes.

Inventors:
 [1];  [1];  [1];  [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
953736
Patent Number(s):
7449699
Application Number:
11/478,573
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Adams, David P, Sinclair, Michael B, Mayer, Thomas M, Vasile, Michael J, and Sweatt, William C. Method and Apparatus for Creating a Topography at a Surface. United States: N. p., 2008. Web.
Adams, David P, Sinclair, Michael B, Mayer, Thomas M, Vasile, Michael J, & Sweatt, William C. Method and Apparatus for Creating a Topography at a Surface. United States.
Adams, David P, Sinclair, Michael B, Mayer, Thomas M, Vasile, Michael J, and Sweatt, William C. Tue . "Method and Apparatus for Creating a Topography at a Surface". United States. https://www.osti.gov/servlets/purl/953736.
@article{osti_953736,
title = {Method and Apparatus for Creating a Topography at a Surface},
author = {Adams, David P and Sinclair, Michael B and Mayer, Thomas M and Vasile, Michael J and Sweatt, William C},
abstractNote = {Methods and apparatus whereby an optical interferometer is utilized to monitor and provide feedback control to an integrated energetic particle column, to create desired topographies, including the depth, shape and/or roughness of features, at a surface of a specimen. Energetic particle columns can direct energetic species including, ions, photons and/or neutral particles to a surface to create features having in-plane dimensions on the order of 1 micron, and a height or depth on the order of 1 nanometer. Energetic processes can include subtractive processes such as sputtering, ablation, focused ion beam milling and, additive processes, such as energetic beam induced chemical vapor deposition. The integration of interferometric methods with processing by energetic species offers the ability to create desired topographies at surfaces, including planar and curved shapes.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {11}
}

Works referenced in this record:

Focused ion beam sculpting curved shape cavities in crystalline and amorphous targets
journal, January 2006

  • Adams, D. P.; Vasile, M. J.; Mayer, T. M.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 4
  • https://doi.org/10.1116/1.2210000

Feedback-controlled ion beam sculpting apparatus
journal, April 2004


Depth control of focused ion-beam milling from a numerical model of the sputter process
journal, January 1999

  • Vasile, Michael J.; Xie, Jushan; Nassar, Raja
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 17, Issue 6
  • https://doi.org/10.1116/1.590959

Coaxial Ion-Photon System
journal, September 2001


Imaging and Material Analysis from Sputter-Induced Light Emission Using Coaxial Ion-Photon Column
journal, September 2002