Micromachined microwave signal control device and method for making same
Abstract
A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.
- Inventors:
-
- San Francisco, CA
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 943488
- Patent Number(s):
- 7420442
- Application Number:
- 11/149,400
- Assignee:
- Sandia Corporation (Livermore, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01P - WAVEGUIDES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Forman, Michael A. Micromachined microwave signal control device and method for making same. United States: N. p., 2008.
Web.
Forman, Michael A. Micromachined microwave signal control device and method for making same. United States.
Forman, Michael A. Tue .
"Micromachined microwave signal control device and method for making same". United States. https://www.osti.gov/servlets/purl/943488.
@article{osti_943488,
title = {Micromachined microwave signal control device and method for making same},
author = {Forman, Michael A},
abstractNote = {A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 02 00:00:00 EDT 2008},
month = {Tue Sep 02 00:00:00 EDT 2008}
}
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