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Title: Contour mode resonators with acoustic reflectors

Abstract

A microelectromechanical (MEM) resonator is disclosed which has a linear or ring-shaped acoustic resonator suspended above a substrate by an acoustic reflector. The acoustic resonator can be formed with a piezoelectric material (e.g. aluminum nitride, zinc oxide or PZT), or using an electrostatically-actuated material. The acoustic reflector (also termed an acoustic mirror) uses alternating sections of a relatively low acoustic impedance Z.sub.L material and a relatively high acoustic impedance Z.sub.H material to isolate the acoustic resonator from the substrate. The MEM resonator, which can be formed on a silicon substrate with conventional CMOS circuitry, has applications for forming oscillators, rf filters, and acoustic sensors.

Inventors:
 [1];  [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
941136
Patent Number(s):
7385334
Application Number:
11/602,011
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Olsson, Roy H, Fleming, James G, and Tuck, Melanie R. Contour mode resonators with acoustic reflectors. United States: N. p., 2008. Web.
Olsson, Roy H, Fleming, James G, & Tuck, Melanie R. Contour mode resonators with acoustic reflectors. United States.
Olsson, Roy H, Fleming, James G, and Tuck, Melanie R. Tue . "Contour mode resonators with acoustic reflectors". United States. https://www.osti.gov/servlets/purl/941136.
@article{osti_941136,
title = {Contour mode resonators with acoustic reflectors},
author = {Olsson, Roy H and Fleming, James G and Tuck, Melanie R},
abstractNote = {A microelectromechanical (MEM) resonator is disclosed which has a linear or ring-shaped acoustic resonator suspended above a substrate by an acoustic reflector. The acoustic resonator can be formed with a piezoelectric material (e.g. aluminum nitride, zinc oxide or PZT), or using an electrostatically-actuated material. The acoustic reflector (also termed an acoustic mirror) uses alternating sections of a relatively low acoustic impedance Z.sub.L material and a relatively high acoustic impedance Z.sub.H material to isolate the acoustic resonator from the substrate. The MEM resonator, which can be formed on a silicon substrate with conventional CMOS circuitry, has applications for forming oscillators, rf filters, and acoustic sensors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {6}
}

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Works referenced in this record:

Design of a high-Q, low-impedance, GHz-range piezoelectric mems resonator
conference, January 2003

  • Antkowiak, B.; Gorman, J. P.; Varghese, M.
  • IEEE International Solid-State Sensors and Actuators Conference, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • https://doi.org/10.1109/SENSOR.2003.1215606

Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromeckanical resonators for UHF applications
conference, January 2005


Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filters
journal, April 2006