Contour mode resonators with acoustic reflectors
Abstract
A microelectromechanical (MEM) resonator is disclosed which has a linear or ring-shaped acoustic resonator suspended above a substrate by an acoustic reflector. The acoustic resonator can be formed with a piezoelectric material (e.g. aluminum nitride, zinc oxide or PZT), or using an electrostatically-actuated material. The acoustic reflector (also termed an acoustic mirror) uses alternating sections of a relatively low acoustic impedance Z.sub.L material and a relatively high acoustic impedance Z.sub.H material to isolate the acoustic resonator from the substrate. The MEM resonator, which can be formed on a silicon substrate with conventional CMOS circuitry, has applications for forming oscillators, rf filters, and acoustic sensors.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 941136
- Patent Number(s):
- 7385334
- Application Number:
- 11/602,011
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Olsson, Roy H, Fleming, James G, and Tuck, Melanie R. Contour mode resonators with acoustic reflectors. United States: N. p., 2008.
Web.
Olsson, Roy H, Fleming, James G, & Tuck, Melanie R. Contour mode resonators with acoustic reflectors. United States.
Olsson, Roy H, Fleming, James G, and Tuck, Melanie R. Tue .
"Contour mode resonators with acoustic reflectors". United States. https://www.osti.gov/servlets/purl/941136.
@article{osti_941136,
title = {Contour mode resonators with acoustic reflectors},
author = {Olsson, Roy H and Fleming, James G and Tuck, Melanie R},
abstractNote = {A microelectromechanical (MEM) resonator is disclosed which has a linear or ring-shaped acoustic resonator suspended above a substrate by an acoustic reflector. The acoustic resonator can be formed with a piezoelectric material (e.g. aluminum nitride, zinc oxide or PZT), or using an electrostatically-actuated material. The acoustic reflector (also termed an acoustic mirror) uses alternating sections of a relatively low acoustic impedance Z.sub.L material and a relatively high acoustic impedance Z.sub.H material to isolate the acoustic resonator from the substrate. The MEM resonator, which can be formed on a silicon substrate with conventional CMOS circuitry, has applications for forming oscillators, rf filters, and acoustic sensors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {6}
}
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Works referenced in this record:
Design of a high-Q, low-impedance, GHz-range piezoelectric mems resonator
conference, January 2003
- Antkowiak, B.; Gorman, J. P.; Varghese, M.
- IEEE International Solid-State Sensors and Actuators Conference, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
Micromechanical "hollow-disk" ring resonators
conference, September 2004
- Li, Sheng-Shian; Lin, Yu-Wei; Xie, Yuan
- 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromeckanical resonators for UHF applications
conference, January 2005
- Piazza, G.; Stephanou, P. J.; Porter, J. M.
- 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.
Micromachined acoustic wave resonator isolated from substrate
journal, August 2005
- Pang, Wei; Zhang, Hao; Kim, Eun Sok
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 52, Issue 8, p. 1239-1246
Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filters
journal, April 2006
- Stephanou, P. J.; Piazza, G.; White, C. D.
- Journal of Physics: Conference Series, Vol. 34
Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps
conference, August 2005
- Lin, Yu-Wei; Li, Sheng-Shian; Xie, Yuan
- Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.