Optical displacement sensor
Abstract
An optical displacement sensor is disclosed which uses a vertical-cavity surface-emitting laser (VCSEL) coupled to an optical cavity formed by a moveable membrane and an output mirror of the VCSEL. This arrangement renders the lasing characteristics of the VCSEL sensitive to any movement of the membrane produced by sound, vibrations, pressure changes, acceleration, etc. Some embodiments of the optical displacement sensor can further include a light-reflective diffractive lens located on the membrane or adjacent to the VCSEL to control the amount of lasing light coupled back into the VCSEL. A photodetector detects a portion of the lasing light from the VCSEL to provide an electrical output signal for the optical displacement sensor which varies with the movement of the membrane.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 936232
- Patent Number(s):
- 7355720
- Application Number:
- 11/314,335
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01D - MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
G - PHYSICS G01 - MEASURING G01H - MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Carr, Dustin W. Optical displacement sensor. United States: N. p., 2008.
Web.
Carr, Dustin W. Optical displacement sensor. United States.
Carr, Dustin W. Tue .
"Optical displacement sensor". United States. https://www.osti.gov/servlets/purl/936232.
@article{osti_936232,
title = {Optical displacement sensor},
author = {Carr, Dustin W},
abstractNote = {An optical displacement sensor is disclosed which uses a vertical-cavity surface-emitting laser (VCSEL) coupled to an optical cavity formed by a moveable membrane and an output mirror of the VCSEL. This arrangement renders the lasing characteristics of the VCSEL sensitive to any movement of the membrane produced by sound, vibrations, pressure changes, acceleration, etc. Some embodiments of the optical displacement sensor can further include a light-reflective diffractive lens located on the membrane or adjacent to the VCSEL to control the amount of lasing light coupled back into the VCSEL. A photodetector detects a portion of the lasing light from the VCSEL to provide an electrical output signal for the optical displacement sensor which varies with the movement of the membrane.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {4}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Self-Calibrating Micromachined Microphones with Integrated Optical Displacement Detection
book, January 2001
- Hall, Neal A.; Degertekin, F. Levent
- Transducers ’01 Eurosensors XV
Fabrication and Characterization of a Micromachined Acoustic Sensor With Integrated Optical Readout
journal, May 2004
- Lee, W.; Hall, N. A.; Zhou, Z.
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, Issue 3
Fabrication of Diffractive Optics: Surface Reliefs and Artificial Dielectrics
book, January 1997
- Arnone, C.; Giaconia, C.; Lullo, G.
- Diffractive Optics and Optical Microsystems
Optical microphone based on a modulated diffractive lens
journal, October 2003
- Sagberg, H.; Sudbo, A.; Solgaard, O.
- IEEE Photonics Technology Letters, Vol. 15, Issue 10
High performance low cost microphones utilising micro-optical technology
conference, January 2003
- Fismen, B. G.; Sagberg, H.; Johansen, I. -R.
- 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682)
Diffractive lens fabricated with mostly zeroth-order gratings
journal, January 1996
- Chen, Frederick T.; Craighead, Harold G.
- Optics Letters, Vol. 21, Issue 3
Comparison of techniques for bonding VCSELS directly to ICs
journal, January 1999
- Pu, Rui; Hayes, E. M.; Wilmsen, C. W.
- Journal of Optics A: Pure and Applied Optics, Vol. 1, Issue 2
Monolithic integration of vertical-cavity surface-emitting lasers and wavelength-shifted resonant-cavity photodetectors
conference, January 2001
- Serkland, D. K.; Geib, K. M.; Allerman, A. A.
- LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)
Optical microphone transduction techniques
journal, January 1997
- Bilaniuk, Nykolai
- Applied Acoustics, Vol. 50, Issue 1
Two MOEMS Microphone Designs for Acoustic Sensing Applications
journal, January 2005
- Avset, Berit S.; Bakke, Kari A. H.; Fismen, Britta. G.
- MRS Proceedings, Vol. 883
Micromachined optical-interference microphone
journal, June 1999
- Greywall, Dennis S.
- Sensors and Actuators A: Physical, Vol. 75, Issue 3
High-density interleaved VCSEL-RCPD arrays for optical information processing
conference, April 2003
- Geib, Kent M.; Serkland, Darwin K.; Allerman, Andrew A.
- Photonics Fabrication Europe, SPIE Proceedings