Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography
Abstract
A method is provided for repairing defects in a multilayer coating layered onto a reticle blank used in an extreme ultraviolet lithography (EUVL) system. Using high lateral spatial resolution, energy is deposited in the multilayer coating in the vicinity of the defect. This can be accomplished using a focused electron beam, focused ion beam or a focused electromagnetic radiation. The absorbed energy will cause a structural modification of the film, producing a localized change in the film thickness. The change in film thickness can be controlled with sub-nanometer accuracy by adjusting the energy dose. The lateral spatial resolution of the thickness modification is controlled by the localization of the energy deposition. The film thickness is adjusted locally to correct the perturbation of the reflected field. For example, when the structural modification is a localized film contraction, the repair of a defect consists of flattening a mound or spreading out the sides of a depression.
- Inventors:
-
- Los Altos, CA
- San Ramon, CA
- Sunol, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 921908
- Patent Number(s):
- 6821682
- Application Number:
- 09/669,390
- Assignee:
- The EUV LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Stearns, Daniel G, Sweeney, Donald W, and Mirkarimi, Paul B. Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography. United States: N. p., 2004.
Web.
Stearns, Daniel G, Sweeney, Donald W, & Mirkarimi, Paul B. Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography. United States.
Stearns, Daniel G, Sweeney, Donald W, and Mirkarimi, Paul B. Tue .
"Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography". United States. https://www.osti.gov/servlets/purl/921908.
@article{osti_921908,
title = {Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography},
author = {Stearns, Daniel G and Sweeney, Donald W and Mirkarimi, Paul B},
abstractNote = {A method is provided for repairing defects in a multilayer coating layered onto a reticle blank used in an extreme ultraviolet lithography (EUVL) system. Using high lateral spatial resolution, energy is deposited in the multilayer coating in the vicinity of the defect. This can be accomplished using a focused electron beam, focused ion beam or a focused electromagnetic radiation. The absorbed energy will cause a structural modification of the film, producing a localized change in the film thickness. The change in film thickness can be controlled with sub-nanometer accuracy by adjusting the energy dose. The lateral spatial resolution of the thickness modification is controlled by the localization of the energy deposition. The film thickness is adjusted locally to correct the perturbation of the reflected field. For example, when the structural modification is a localized film contraction, the repair of a defect consists of flattening a mound or spreading out the sides of a depression.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {11}
}