Low-cost method for producing extreme ultraviolet lithography optics
Abstract
Spherical and non-spherical optical elements produced by standard optical figuring and polishing techniques are extremely expensive. Such surfaces can be cheaply produced by diamond turning; however, the roughness in the diamond turned surface prevent their use for EUV lithography. These ripples are smoothed with a coating of polyimide before applying a 60 period Mo/Si multilayer to reflect a wavelength of 134 .ANG. and have obtained peak reflectivities close to 63%. The savings in cost are about a factor of 100.
- Inventors:
-
- Livermore, CA
- Fort Collins, CO
- Mt. Kisco, NY
- Issue Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 921901
- Patent Number(s):
- 6634760
- Application Number:
- 09/940,099
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Folta, James A, Montcalm, Claude, Taylor, John S, and Spiller, Eberhard A. Low-cost method for producing extreme ultraviolet lithography optics. United States: N. p., 2003.
Web.
Folta, James A, Montcalm, Claude, Taylor, John S, & Spiller, Eberhard A. Low-cost method for producing extreme ultraviolet lithography optics. United States.
Folta, James A, Montcalm, Claude, Taylor, John S, and Spiller, Eberhard A. Fri .
"Low-cost method for producing extreme ultraviolet lithography optics". United States. https://www.osti.gov/servlets/purl/921901.
@article{osti_921901,
title = {Low-cost method for producing extreme ultraviolet lithography optics},
author = {Folta, James A and Montcalm, Claude and Taylor, John S and Spiller, Eberhard A},
abstractNote = {Spherical and non-spherical optical elements produced by standard optical figuring and polishing techniques are extremely expensive. Such surfaces can be cheaply produced by diamond turning; however, the roughness in the diamond turned surface prevent their use for EUV lithography. These ripples are smoothed with a coating of polyimide before applying a 60 period Mo/Si multilayer to reflect a wavelength of 134 .ANG. and have obtained peak reflectivities close to 63%. The savings in cost are about a factor of 100.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {11}
}