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Title: Combined plasma/liquid cleaning of substrates

Abstract

Apparatus and method for cleaning substrates. A substrate is held and rotated by a chuck and an atmospheric pressure plasma jet places a plasma onto predetermined areas of the substrate. Subsequently liquid rinse is sprayed onto the predetermined areas. In one embodiment, a nozzle sprays a gas onto the predetermined areas to assist in drying the predetermined areas when needed.

Inventors:
 [1];  [1]
  1. (Los Alamos, NM)
Issue Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM
Sponsoring Org.:
USDOE
OSTI Identifier:
921358
Patent Number(s):
6,546,938
Application Number:
09/803,065
Assignee:
The Regents of the University of California (Los Alamos, NM) ALO
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Selwyn, Gary S., and Henins, Ivars. Combined plasma/liquid cleaning of substrates. United States: N. p., 2003. Web.
Selwyn, Gary S., & Henins, Ivars. Combined plasma/liquid cleaning of substrates. United States.
Selwyn, Gary S., and Henins, Ivars. Tue . "Combined plasma/liquid cleaning of substrates". United States. https://www.osti.gov/servlets/purl/921358.
@article{osti_921358,
title = {Combined plasma/liquid cleaning of substrates},
author = {Selwyn, Gary S. and Henins, Ivars},
abstractNote = {Apparatus and method for cleaning substrates. A substrate is held and rotated by a chuck and an atmospheric pressure plasma jet places a plasma onto predetermined areas of the substrate. Subsequently liquid rinse is sprayed onto the predetermined areas. In one embodiment, a nozzle sprays a gas onto the predetermined areas to assist in drying the predetermined areas when needed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {4}
}

Patent:

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