Combined plasma/liquid cleaning of substrates
Abstract
Apparatus and method for cleaning substrates. A substrate is held and rotated by a chuck and an atmospheric pressure plasma jet places a plasma onto predetermined areas of the substrate. Subsequently liquid rinse is sprayed onto the predetermined areas. In one embodiment, a nozzle sprays a gas onto the predetermined areas to assist in drying the predetermined areas when needed.
- Inventors:
-
- (Los Alamos, NM)
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 921358
- Patent Number(s):
- 6,546,938
- Application Number:
- 09/803,065
- Assignee:
- The Regents of the University of California (Los Alamos, NM) ALO
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Selwyn, Gary S., and Henins, Ivars. Combined plasma/liquid cleaning of substrates. United States: N. p., 2003.
Web.
Selwyn, Gary S., & Henins, Ivars. Combined plasma/liquid cleaning of substrates. United States.
Selwyn, Gary S., and Henins, Ivars. Tue .
"Combined plasma/liquid cleaning of substrates". United States. https://www.osti.gov/servlets/purl/921358.
@article{osti_921358,
title = {Combined plasma/liquid cleaning of substrates},
author = {Selwyn, Gary S. and Henins, Ivars},
abstractNote = {Apparatus and method for cleaning substrates. A substrate is held and rotated by a chuck and an atmospheric pressure plasma jet places a plasma onto predetermined areas of the substrate. Subsequently liquid rinse is sprayed onto the predetermined areas. In one embodiment, a nozzle sprays a gas onto the predetermined areas to assist in drying the predetermined areas when needed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {4}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.