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Title: Alternative backing up pump for turbomolecular pumps

Abstract

As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volumes to water with the water then being cryo-pumped to a low pressure of below about 1.e.sup.-3 Torr at 150.degree. K. Cryo-pumping is achieved using a low cost Kleemenco cycle cryocooler, a somewhat more expensive thermoelectric cooler, a Venturi cooler or a similar device to achieve the required minimization of hydrogen partial pressure.

Inventors:
 [1]
  1. Yorktown, VA
Issue Date:
Research Org.:
Southeastern Universities Research Assn. (Newport News, VA)
Sponsoring Org.:
USDOE
OSTI Identifier:
921322
Patent Number(s):
6550256
Application Number:
09/941,344
Assignee:
Southeastern Universities Research Assn. (Newport News, VA)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
F - MECHANICAL ENGINEERING F04 - POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS F04D - NON-POSITIVE-DISPLACEMENT PUMPS
DOE Contract Number:  
AC05-84ER40150
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Myneni, Ganapati Rao. Alternative backing up pump for turbomolecular pumps. United States: N. p., 2003. Web.
Myneni, Ganapati Rao. Alternative backing up pump for turbomolecular pumps. United States.
Myneni, Ganapati Rao. Tue . "Alternative backing up pump for turbomolecular pumps". United States. https://www.osti.gov/servlets/purl/921322.
@article{osti_921322,
title = {Alternative backing up pump for turbomolecular pumps},
author = {Myneni, Ganapati Rao},
abstractNote = {As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volumes to water with the water then being cryo-pumped to a low pressure of below about 1.e.sup.-3 Torr at 150.degree. K. Cryo-pumping is achieved using a low cost Kleemenco cycle cryocooler, a somewhat more expensive thermoelectric cooler, a Venturi cooler or a similar device to achieve the required minimization of hydrogen partial pressure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {4}
}

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