Alternative backing up pump for turbomolecular pumps
Abstract
As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volumes to water with the water then being cryo-pumped to a low pressure of below about 1.e.sup.-3 Torr at 150.degree. K. Cryo-pumping is achieved using a low cost Kleemenco cycle cryocooler, a somewhat more expensive thermoelectric cooler, a Venturi cooler or a similar device to achieve the required minimization of hydrogen partial pressure.
- Inventors:
-
- Yorktown, VA
- Issue Date:
- Research Org.:
- Southeastern Universities Research Assn. (Newport News, VA)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 921322
- Patent Number(s):
- 6550256
- Application Number:
- 09/941,344
- Assignee:
- Southeastern Universities Research Assn. (Newport News, VA)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
F - MECHANICAL ENGINEERING F04 - POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS F04D - NON-POSITIVE-DISPLACEMENT PUMPS
- DOE Contract Number:
- AC05-84ER40150
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Myneni, Ganapati Rao. Alternative backing up pump for turbomolecular pumps. United States: N. p., 2003.
Web.
Myneni, Ganapati Rao. Alternative backing up pump for turbomolecular pumps. United States.
Myneni, Ganapati Rao. Tue .
"Alternative backing up pump for turbomolecular pumps". United States. https://www.osti.gov/servlets/purl/921322.
@article{osti_921322,
title = {Alternative backing up pump for turbomolecular pumps},
author = {Myneni, Ganapati Rao},
abstractNote = {As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volumes to water with the water then being cryo-pumped to a low pressure of below about 1.e.sup.-3 Torr at 150.degree. K. Cryo-pumping is achieved using a low cost Kleemenco cycle cryocooler, a somewhat more expensive thermoelectric cooler, a Venturi cooler or a similar device to achieve the required minimization of hydrogen partial pressure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {4}
}