Alternative backing up pump for turbomolecular pumps

Title: Alternative backing up pump for turbomolecular pumps

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Abstract

As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volumes to water with the water then being cryo-pumped to a low pressure of below about 1.e.sup.-3 Torr at 150.degree. K. Cryo-pumping is achieved using a low cost Kleemenco cycle cryocooler, a somewhat more expensive thermoelectric cooler, a Venturi cooler or a similar device to achieve the required minimization of hydrogen partial pressure.

Inventors:

Myneni, Ganapati Rao ^[1]

Yorktown, VA

Issue Date:: 2003-04-22

Research Org.:: Southeastern Universities Research Assn. (Newport News, VA)

Sponsoring Org.:: USDOE

OSTI Identifier:: 921322

Patent Number(s):: 6550256

Application Number:: 09/941,344

Assignee:: Southeastern Universities Research Assn. (Newport News, VA)

Patent Classifications (CPCs):: Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

F - MECHANICAL ENGINEERING F04 - POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS F04D - NON-POSITIVE-DISPLACEMENT PUMPS

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Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S417/901 - Cryogenic pumps

F - MECHANICAL ENGINEERING F04 - POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS F04D - NON-POSITIVE-DISPLACEMENT PUMPS
F04D19/042 - {Turbomolecular vacuum pumps}
F04D25/16 - Combinations of two or more pumps {Producing two or more separate gas flows}

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DOE Contract Number:: AC05-84ER40150

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Citation Formats


                    Myneni, Ganapati Rao. Alternative backing up pump for turbomolecular pumps.  United States: N. p., 2003. 
        Web.

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                    Myneni, Ganapati Rao. Alternative backing up pump for turbomolecular pumps.  United States.

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                    Myneni, Ganapati Rao. Tue .  
        "Alternative backing up pump for turbomolecular pumps".  United States.  https://www.osti.gov/servlets/purl/921322.

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@article{osti_921322,

  title        = {Alternative backing up pump for turbomolecular pumps},

  author       = {Myneni, Ganapati Rao},

  abstractNote = {As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volumes to water with the water then being cryo-pumped to a low pressure of below about 1.e.sup.-3 Torr at 150.degree. K. Cryo-pumping is achieved using a low cost Kleemenco cycle cryocooler, a somewhat more expensive thermoelectric cooler, a Venturi cooler or a similar device to achieve the required minimization of hydrogen partial pressure.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2003},

  month        = {4}

}

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