Surface contouring by controlled application of processing fluid using Marangoni effect
Abstract
An apparatus and method for modifying the surface of an object by contacting said surface with a liquid processing solution using the liquid applicator geometry and Marangoni effect (surface tension gradient-driven flow) to define and confine the dimensions of the wetted zone on said object surface. In particular, the method and apparatus involve contouring or figuring the surface of an object using an etchant solution as the wetting fluid and using realtime metrology (e.g. interferometry) to control the placement and dwell time of this wetted zone locally on the surface of said object, thereby removing material from the surface of the object in a controlled manner. One demonstrated manifestation is in the deterministic optical figuring of thin glasses by wet chemical etching using a buffered hydrofluoric acid solution and Marangoni effect.
- Inventors:
-
- Livermore, CA
- Oakley, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 921307
- Patent Number(s):
- 6555017
- Application Number:
- 09/687,775
- Assignee:
- The Regents of the University of Caliofornia (Oakland, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Rushford, Michael C, and Britten, Jerald A. Surface contouring by controlled application of processing fluid using Marangoni effect. United States: N. p., 2003.
Web.
Rushford, Michael C, & Britten, Jerald A. Surface contouring by controlled application of processing fluid using Marangoni effect. United States.
Rushford, Michael C, and Britten, Jerald A. Tue .
"Surface contouring by controlled application of processing fluid using Marangoni effect". United States. https://www.osti.gov/servlets/purl/921307.
@article{osti_921307,
title = {Surface contouring by controlled application of processing fluid using Marangoni effect},
author = {Rushford, Michael C and Britten, Jerald A},
abstractNote = {An apparatus and method for modifying the surface of an object by contacting said surface with a liquid processing solution using the liquid applicator geometry and Marangoni effect (surface tension gradient-driven flow) to define and confine the dimensions of the wetted zone on said object surface. In particular, the method and apparatus involve contouring or figuring the surface of an object using an etchant solution as the wetting fluid and using realtime metrology (e.g. interferometry) to control the placement and dwell time of this wetted zone locally on the surface of said object, thereby removing material from the surface of the object in a controlled manner. One demonstrated manifestation is in the deterministic optical figuring of thin glasses by wet chemical etching using a buffered hydrofluoric acid solution and Marangoni effect.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {4}
}