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Title: Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom

Abstract

The present invention provides a biaxially textured laminate article having a polycrystalline biaxially textured metallic substrate with an electrically conductive oxide layer epitaxially deposited thereon and methods for producing same. In one embodiment a biaxially texture Ni substrate has a layer of LaNiO.sub.3 deposited thereon. An initial layer of electrically conductive oxide buffer is epitaxially deposited using a sputtering technique using a sputtering gas which is an inert or forming gas. A subsequent layer of an electrically conductive oxide layer is then epitaxially deposited onto the initial layer using a sputtering gas comprising oxygen. The present invention will enable the formation of biaxially textured devices which include HTS wires and interconnects, large area or long length ferromagnetic and/or ferroelectric memory devices, large area or long length, flexible light emitting semiconductors, ferroelectric tapes, and electrodes.

Inventors:
 [1];  [2]
  1. Oak Ridge, TN
  2. Bloomington, MN
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
921306
Patent Number(s):
6555256
Application Number:
09/706,972
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Christen, David K, and He, Qing. Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom. United States: N. p., 2003. Web.
Christen, David K, & He, Qing. Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom. United States.
Christen, David K, and He, Qing. Tue . "Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom". United States. https://www.osti.gov/servlets/purl/921306.
@article{osti_921306,
title = {Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom},
author = {Christen, David K and He, Qing},
abstractNote = {The present invention provides a biaxially textured laminate article having a polycrystalline biaxially textured metallic substrate with an electrically conductive oxide layer epitaxially deposited thereon and methods for producing same. In one embodiment a biaxially texture Ni substrate has a layer of LaNiO.sub.3 deposited thereon. An initial layer of electrically conductive oxide buffer is epitaxially deposited using a sputtering technique using a sputtering gas which is an inert or forming gas. A subsequent layer of an electrically conductive oxide layer is then epitaxially deposited onto the initial layer using a sputtering gas comprising oxygen. The present invention will enable the formation of biaxially textured devices which include HTS wires and interconnects, large area or long length ferromagnetic and/or ferroelectric memory devices, large area or long length, flexible light emitting semiconductors, ferroelectric tapes, and electrodes.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {4}
}

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Works referenced in this record:

In‐plane epitaxial alignment of YBa 2 Cu 3 O 7− x films grown on silver crystals and buffer layers
journal, April 1993


High‐field critical current densities in Bi 2 Sr 2 Ca 1 Cu 2 O 8+ x /Ag wires
journal, December 1989


Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from high Tc bulk material
journal, August 1987


Synthesis of PbTiO3 film on LaNiO3-coated substrate by the spray-ICP technique
journal, October 1994


High current YBa 2 Cu 3 O 7−δ thick films on flexible nickel substrates with textured buffer layers
journal, October 1994


High critical current densities in Bi(2223)/Ag tapes
journal, January 1992


Metal buffer layers and Y‐Ba‐Cu‐O thin films on Pt and stainless steel using pulsed laser deposition
journal, August 1990


a ‐axis oriented epitaxial YBa 2 Cu 3 O 7− x ‐PrBa 2 Cu 3 O 7− y heterostructures
journal, December 1990


LaNiO/sub 3/: a promising material for contact with YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films
journal, January 1995


Orientation Dependence of Grain-Boundary Critical Currents in Y Ba 2 Cu 3 O 7 δ Bicrystals
journal, July 1988


High critical current density superconducting tapes by epitaxial deposition of YBa2Cu3Ox thick films on biaxially textured metals
journal, September 1996


High-J/sub c/ silver-sheathed Bi-based superconducting wires
journal, March 1991


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Growth of C-axis oriented YBaCuO films on oxidized textured Ni sheets and on
journal, March 1991


Superconducting transport properties of grain boundaries in YBa 2 Cu 3 O 7 bicrystals
journal, March 1990


Superconducting YBa 2 Cu 3 O 6.8 films on metallic substrates using in situ laser deposition
journal, June 1990