Heterodyne interferometer with angstrom-level periodic nonlinearity

Schmitz, Tony L; Beckwith, John F

Title: Heterodyne interferometer with angstrom-level periodic nonlinearity

Abstract

Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acousto-optic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beam can be utilized to provide interferometer measurement data.

Inventors:

Schmitz, Tony L ^[1]; Beckwith, John F ^[2]

Gainesville, FL
Indialantic, FL

Issue Date:: 2005-01-25

Sponsoring Org.:: USDOE

OSTI Identifier:: 920035

Patent Number(s):: 6847455

Application Number:: 10/254,567

Assignee:: The United States of America as represented by the Department of Energy (Washington, DC)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B2290/15 - Cat eye, i.e. reflection always parallel to incoming beam
G01B9/02028 - {Two or more reference or object arms in one interferometer}
G01B2290/30 - Grating as beam-splitter
G01B9/02003 - {by using beat frequencies generated by mixing of two or more frequencies}

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Resource Type:: Patent

Country of Publication:: United States

Language:: English

Citation Formats


                    Schmitz, Tony L, and Beckwith, John F. Heterodyne interferometer with angstrom-level periodic nonlinearity.  United States: N. p., 2005. 
        Web.

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                    Schmitz, Tony L, & Beckwith, John F. Heterodyne interferometer with angstrom-level periodic nonlinearity.  United States.

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                    Schmitz, Tony L, and Beckwith, John F. Tue .  
        "Heterodyne interferometer with angstrom-level periodic nonlinearity".  United States.  https://www.osti.gov/servlets/purl/920035.

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@article{osti_920035,

  title        = {Heterodyne interferometer with angstrom-level periodic nonlinearity},

  author       = {Schmitz, Tony L and Beckwith, John F},

  abstractNote = {Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acousto-optic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beam can be utilized to provide interferometer measurement data.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2005},

  month        = {1}

}

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Works referenced in this record:

Non-linearity in length measurement using heterodyne laser Michelson interferometry
journal, October 1987

Sutton, C. M.
Journal of Physics E: Scientific Instruments, Vol. 20, Issue 10
https://doi.org/10.1088/0022-3735/20/10/034

A simple technique for observing periodic nonlinearities in Michelson interferometers
journal, October 1998

Stone, Jack A.; Howard, Lowell P.
Precision Engineering, Vol. 22, Issue 4
https://doi.org/10.1016/S0141-6359(98)00016-6

A frequency domain method for the measurement of nonlinearity in heterodyne interferometry
journal, January 2000

Badami, V. G.; Patterson, S. R.
Precision Engineering, Vol. 24, Issue 1
https://doi.org/10.1016/S0141-6359(99)00026-4

Optical sources of non-linearity in heterodyne interferometers
journal, January 1990

Rosenbluth, A. E.; Bobroff, N.
Precision Engineering, Vol. 12, Issue 1
https://doi.org/10.1016/0141-6359(90)90003-H

Recent advances in displacement measuring interferometry
journal, September 1993

Bobroff, N.
Measurement Science and Technology, Vol. 4, Issue 9
https://doi.org/10.1088/0957-0233/4/9/001

Sub-micron position measurement and control on precision machine tools with laser interferometry
journal, January 1990

Steinmetz, C. R.
Precision Engineering, Vol. 12, Issue 1
https://doi.org/10.1016/0141-6359(90)90004-I

Analysis of the measurement error of the parameters of mechanical vibrations
journal, July 1980

Fedotova, G. V.
Measurement Techniques, Vol. 23, Issue 7
https://doi.org/10.1007/BF00825465

Heterodyne interferometer to measure vibration parameters
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Barash, V. Ya.; Fedotova, G. V.
Measurement Techniques, Vol. 27, Issue 1
https://doi.org/10.1007/BF01100606

Residual errors in laser interferometry from air turbulence and nonlinearity
journal, January 1987

Bobroff, Norman
Applied Optics, Vol. 26, Issue 13
https://doi.org/10.1364/AO.26.002676

Analytical modeling of the periodic nonlinearity in heterodyne interferometry
journal, January 1998

Wu, Chien-Ming; Deslattes, Richard D.
Applied Optics, Vol. 37, Issue 28
https://doi.org/10.1364/AO.37.006696

Probing of Acoustic Surface Perturbations by Coherent Light
journal, January 1969

Whitman, R. L.; Korpel, A.
Applied Optics, Vol. 8, Issue 8
https://doi.org/10.1364/AO.8.001567

Heterodyne interferometer with subatomic periodic nonlinearity
journal, January 1999

Wu, Chien-ming; Lawall, John; Deslattes, Richard D.
Applied Optics, Vol. 38, Issue 19
https://doi.org/10.1364/AO.38.004089

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Similar Records

Title: Heterodyne interferometer with angstrom-level periodic nonlinearity

Abstract

Citation Formats

Non-linearity in length measurement using heterodyne laser Michelson interferometry journal, October 1987

A simple technique for observing periodic nonlinearities in Michelson interferometers journal, October 1998

A frequency domain method for the measurement of nonlinearity in heterodyne interferometry journal, January 2000

Optical sources of non-linearity in heterodyne interferometers journal, January 1990

Recent advances in displacement measuring interferometry journal, September 1993

Sub-micron position measurement and control on precision machine tools with laser interferometry journal, January 1990

Analysis of the measurement error of the parameters of mechanical vibrations journal, July 1980

Heterodyne interferometer to measure vibration parameters journal, January 1984

Residual errors in laser interferometry from air turbulence and nonlinearity journal, January 1987

Analytical modeling of the periodic nonlinearity in heterodyne interferometry journal, January 1998

Probing of Acoustic Surface Perturbations by Coherent Light journal, January 1969

Heterodyne interferometer with subatomic periodic nonlinearity journal, January 1999

Non-linearity in length measurement using heterodyne laser Michelson interferometry
journal, October 1987

A simple technique for observing periodic nonlinearities in Michelson interferometers
journal, October 1998

A frequency domain method for the measurement of nonlinearity in heterodyne interferometry
journal, January 2000

Optical sources of non-linearity in heterodyne interferometers
journal, January 1990

Recent advances in displacement measuring interferometry
journal, September 1993

Sub-micron position measurement and control on precision machine tools with laser interferometry
journal, January 1990

Analysis of the measurement error of the parameters of mechanical vibrations
journal, July 1980

Heterodyne interferometer to measure vibration parameters
journal, January 1984

Residual errors in laser interferometry from air turbulence and nonlinearity
journal, January 1987

Analytical modeling of the periodic nonlinearity in heterodyne interferometry
journal, January 1998

Probing of Acoustic Surface Perturbations by Coherent Light
journal, January 1969

Heterodyne interferometer with subatomic periodic nonlinearity
journal, January 1999