Matching network for RF plasma source
Abstract
A compact matching network couples an RF power supply to an RF antenna in a plasma generator. The simple and compact impedance matching network matches the plasma load to the impedance of a coaxial transmission line and the output impedance of an RF amplifier at radio frequencies. The matching network is formed of a resonantly tuned circuit formed of a variable capacitor and an inductor in a series resonance configuration, and a ferrite core transformer coupled to the resonantly tuned circuit. This matching network is compact enough to fit in existing compact focused ion beam systems.
- Inventors:
-
- Palo Alto, CA
- Hercules, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 919903
- Patent Number(s):
- 7298091
- Application Number:
- 10/060,826
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Pickard, Daniel S, and Leung, Ka-Ngo. Matching network for RF plasma source. United States: N. p., 2007.
Web.
Pickard, Daniel S, & Leung, Ka-Ngo. Matching network for RF plasma source. United States.
Pickard, Daniel S, and Leung, Ka-Ngo. Tue .
"Matching network for RF plasma source". United States. https://www.osti.gov/servlets/purl/919903.
@article{osti_919903,
title = {Matching network for RF plasma source},
author = {Pickard, Daniel S and Leung, Ka-Ngo},
abstractNote = {A compact matching network couples an RF power supply to an RF antenna in a plasma generator. The simple and compact impedance matching network matches the plasma load to the impedance of a coaxial transmission line and the output impedance of an RF amplifier at radio frequencies. The matching network is formed of a resonantly tuned circuit formed of a variable capacitor and an inductor in a series resonance configuration, and a ferrite core transformer coupled to the resonantly tuned circuit. This matching network is compact enough to fit in existing compact focused ion beam systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {11}
}
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