Silicon fiber optic sensors
Abstract
A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.
- Inventors:
-
- Livermore, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 917190
- Patent Number(s):
- 7277605
- Application Number:
- 11/132,663
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01D - MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Pocha, Michael D, Swierkowski, Steve P, and Wood, Billy E. Silicon fiber optic sensors. United States: N. p., 2007.
Web.
Pocha, Michael D, Swierkowski, Steve P, & Wood, Billy E. Silicon fiber optic sensors. United States.
Pocha, Michael D, Swierkowski, Steve P, and Wood, Billy E. Tue .
"Silicon fiber optic sensors". United States. https://www.osti.gov/servlets/purl/917190.
@article{osti_917190,
title = {Silicon fiber optic sensors},
author = {Pocha, Michael D and Swierkowski, Steve P and Wood, Billy E},
abstractNote = {A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {10}
}
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