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Title: Vacuum compatible, high-speed, 2-D mirror tilt stage

Abstract

A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

Inventors:
;  [1]
  1. Crockett, CA
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
916927
Patent Number(s):
7273289
Assignee:
Euv LLC (Santa Clara, CA)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Denham,, and Paul, E. Vacuum compatible, high-speed, 2-D mirror tilt stage. United States: N. p., 2007. Web.
Denham,, & Paul, E. Vacuum compatible, high-speed, 2-D mirror tilt stage. United States.
Denham,, and Paul, E. Tue . "Vacuum compatible, high-speed, 2-D mirror tilt stage". United States. https://www.osti.gov/servlets/purl/916927.
@article{osti_916927,
title = {Vacuum compatible, high-speed, 2-D mirror tilt stage},
author = {Denham, and Paul, E},
abstractNote = {A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {9}
}

Patent:

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