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Title: Detection of electromagnetic radiation using micromechanical multiple quantum wells structures

Abstract

An apparatus and method for detecting electromagnetic radiation employs a deflectable micromechanical apparatus incorporating multiple quantum wells structures. When photons strike the quantum-well structure, physical stresses are created within the sensor, similar to a "bimetallic effect." The stresses cause the sensor to bend. The extent of deflection of the sensor can be measured through any of a variety of conventional means to provide a measurement of the photons striking the sensor. A large number of such sensors can be arranged in a two-dimensional array to provide imaging capability.

Inventors:
 [1];  [1];  [1]
  1. Knoxville, TN
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
913119
Patent Number(s):
7244959
Application Number:
11/358,933
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Datskos, Panagiotis G, Rajic, Slobodan, and Datskou, Irene. Detection of electromagnetic radiation using micromechanical multiple quantum wells structures. United States: N. p., 2007. Web.
Datskos, Panagiotis G, Rajic, Slobodan, & Datskou, Irene. Detection of electromagnetic radiation using micromechanical multiple quantum wells structures. United States.
Datskos, Panagiotis G, Rajic, Slobodan, and Datskou, Irene. Tue . "Detection of electromagnetic radiation using micromechanical multiple quantum wells structures". United States. https://www.osti.gov/servlets/purl/913119.
@article{osti_913119,
title = {Detection of electromagnetic radiation using micromechanical multiple quantum wells structures},
author = {Datskos, Panagiotis G and Rajic, Slobodan and Datskou, Irene},
abstractNote = {An apparatus and method for detecting electromagnetic radiation employs a deflectable micromechanical apparatus incorporating multiple quantum wells structures. When photons strike the quantum-well structure, physical stresses are created within the sensor, similar to a "bimetallic effect." The stresses cause the sensor to bend. The extent of deflection of the sensor can be measured through any of a variety of conventional means to provide a measurement of the photons striking the sensor. A large number of such sensors can be arranged in a two-dimensional array to provide imaging capability.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 17 00:00:00 EDT 2007},
month = {Tue Jul 17 00:00:00 EDT 2007}
}

Works referenced in this record:

Remote infrared radiation detection using piezoresistive microcantilevers
journal, November 1996


Photoinduced and thermal stress in silicon microcantilevers
journal, October 1998


Optical and infrared detection using microcantilevers
report, May 1996