MEMS fluidic actuator

Title: MEMS fluidic actuator

Abstract

The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

Inventors:

Kholwadwala, Deepesh K ^[1]; Johnston, Gabriel A ^[2]; Rohrer, Brandon R ^[1]; Galambos, Paul C ^[1]; Okandan, Murat ^[1]

Albuquerque, NM
Trophy Club, TX

Issue Date:: 2007-07-24

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 912875

Patent Number(s):: 7246524

Application Number:: 11/120,843

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16K - VALVES

B - PERFORMING OPERATIONS B64 - AIRCRAFT B64C - AEROPLANES

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F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16K - VALVES
F16K99/0001 - {Microvalves

B - PERFORMING OPERATIONS B64 - AIRCRAFT B64C - AEROPLANES
B64C3/46 - by inflatable elements

F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16K - VALVES
F16K99/0048 - {using piezoelectric means}
F16K99/0051 - {using electrostatic means}
F16K99/0007 - {of cantilever type}
F16K2099/009 - {Fluid power devices}
F16K99/0011 - {Gate valves or sliding valves}
F16K99/0036 - {operated by temperature variations}
F16K99/0013 - {Rotary valves}

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Kholwadwala, Deepesh K, Johnston, Gabriel A, Rohrer, Brandon R, Galambos, Paul C, and Okandan, Murat. MEMS fluidic actuator.  United States: N. p., 2007. 
        Web.

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                    Kholwadwala, Deepesh K, Johnston, Gabriel A, Rohrer, Brandon R, Galambos, Paul C, & Okandan, Murat. MEMS fluidic actuator.  United States.

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                    Kholwadwala, Deepesh K, Johnston, Gabriel A, Rohrer, Brandon R, Galambos, Paul C, and Okandan, Murat. Tue .  
        "MEMS fluidic actuator".  United States.  https://www.osti.gov/servlets/purl/912875.

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@article{osti_912875,

  title        = {MEMS fluidic actuator},

  author       = {Kholwadwala, Deepesh K and Johnston, Gabriel A and Rohrer, Brandon R and Galambos, Paul C and Okandan, Murat},

  abstractNote = {The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2007},

  month        = {7}

}

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Works referenced in this record:

An Overview of Mems-Based Micropropulsion Developments at jpl
journal, May 2003

Mueller, Juergen; Marrese, Colleen; Polk, James
Acta Astronautica, Vol. 52, Issue 9-12
https://doi.org/10.1016/S0094-5765(03)00069-9

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Title: MEMS fluidic actuator

Abstract

Citation Formats

An Overview of Mems-Based Micropropulsion Developments at jpl journal, May 2003

An Overview of Mems-Based Micropropulsion Developments at jpl
journal, May 2003