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Title: Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor

Abstract

An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.

Inventors:
 [1];  [2];  [1];  [3]
  1. Naperville, IL
  2. Downers Grove, IL
  3. Bolingbrook, IL
Issue Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL
Sponsoring Org.:
USDOE
OSTI Identifier:
912841
Patent Number(s):
6,422,077
Application Number:
09/543,992
Assignee:
6,422,077 CHO
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Krauss, Alan R, Gruen, Dieter M, Pellin, Michael J, and Auciello, Orlando. Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor. United States: N. p., 2002. Web.
Krauss, Alan R, Gruen, Dieter M, Pellin, Michael J, & Auciello, Orlando. Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor. United States.
Krauss, Alan R, Gruen, Dieter M, Pellin, Michael J, and Auciello, Orlando. Tue . "Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor". United States. https://www.osti.gov/servlets/purl/912841.
@article{osti_912841,
title = {Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor},
author = {Krauss, Alan R and Gruen, Dieter M and Pellin, Michael J and Auciello, Orlando},
abstractNote = {An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {7}
}

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