Apparatus and processes for the mass production of photovoltaic modules
Abstract
An apparatus and processes for large scale inline manufacturing of CdTe photovoltaic modules in which all steps, including rapid substrate heating, deposition of CdS, deposition of CdTe, CdCl.sub.2 treatment, and ohmic contact formation, are performed within a single vacuum boundary at modest vacuum pressures. A p+ ohmic contact region is formed by subliming a metal salt onto the CdTe layer. A back electrode is formed by way of a low cost spray process, and module scribing is performed by means of abrasive blasting or mechanical brushing through a mask. The vacuum process apparatus facilitates selective heating of substrates and films, exposure of substrates and films to vapor with minimal vapor leakage, deposition of thin films onto a substrate, and stripping thin films from a substrate. A substrate transport apparatus permits the movement of substrates into and out of vacuum during the thin film deposition processes, while preventing the collection of coatings on the substrate transport apparatus itself.
- Inventors:
-
- Ft. Collins, CO
- Fort Collins, CO
- Issue Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 909412
- Patent Number(s):
- 7220321
- Application Number:
- 10/808,050
- Assignee:
- Barth, Kurt L. (Ft. Collins, CO); Enzenroth, Robert A. (Fort Collins, CO); Sampath, Walajabad S. (Fort Collins, CO)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 14 SOLAR ENERGY
Citation Formats
Barth, Kurt L, Enzenroth, Robert A, and Sampath, Walajabad S. Apparatus and processes for the mass production of photovoltaic modules. United States: N. p., 2007.
Web.
Barth, Kurt L, Enzenroth, Robert A, & Sampath, Walajabad S. Apparatus and processes for the mass production of photovoltaic modules. United States.
Barth, Kurt L, Enzenroth, Robert A, and Sampath, Walajabad S. Tue .
"Apparatus and processes for the mass production of photovoltaic modules". United States. https://www.osti.gov/servlets/purl/909412.
@article{osti_909412,
title = {Apparatus and processes for the mass production of photovoltaic modules},
author = {Barth, Kurt L and Enzenroth, Robert A and Sampath, Walajabad S},
abstractNote = {An apparatus and processes for large scale inline manufacturing of CdTe photovoltaic modules in which all steps, including rapid substrate heating, deposition of CdS, deposition of CdTe, CdCl.sub.2 treatment, and ohmic contact formation, are performed within a single vacuum boundary at modest vacuum pressures. A p+ ohmic contact region is formed by subliming a metal salt onto the CdTe layer. A back electrode is formed by way of a low cost spray process, and module scribing is performed by means of abrasive blasting or mechanical brushing through a mask. The vacuum process apparatus facilitates selective heating of substrates and films, exposure of substrates and films to vapor with minimal vapor leakage, deposition of thin films onto a substrate, and stripping thin films from a substrate. A substrate transport apparatus permits the movement of substrates into and out of vacuum during the thin film deposition processes, while preventing the collection of coatings on the substrate transport apparatus itself.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {5}
}