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Title: Anti-stiction coating for microelectromechanical devices

Abstract

A method for depositing an anti-stiction coating on a MEMS device comprises reacting the vapor of an amino-functionalized silane precursor with a silicon surface of the MEMS device in a vacuum chamber. The method can further comprise cleaning the silicon surface of the MEMS device to form a clean hydroxylated silicon surface prior to reacting the precursor vapor with the silicon surface. The amino-functionalized silane precursor comprises at least one silicon atom, at least one reactive amino (or imine) pendant, and at least one hydrophobic pendant. The amino-functionalized silane precursor is highly reactive with the silicon surface, thereby eliminating the need for a post-process anneal step and enabling the reaction to occur at low pressure. Such vapor-phase deposition of the amino-functionalized silane coating provides a uniform surface morphology and strong adhesion to the silicon surface.

Inventors:
 [1];  [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
908432
Patent Number(s):
7045170
Application Number:
10/115,411
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Hankins, Matthew G, Mayer, Thomas M, and Wheeler, David R. Anti-stiction coating for microelectromechanical devices. United States: N. p., 2006. Web.
Hankins, Matthew G, Mayer, Thomas M, & Wheeler, David R. Anti-stiction coating for microelectromechanical devices. United States.
Hankins, Matthew G, Mayer, Thomas M, and Wheeler, David R. Tue . "Anti-stiction coating for microelectromechanical devices". United States. https://www.osti.gov/servlets/purl/908432.
@article{osti_908432,
title = {Anti-stiction coating for microelectromechanical devices},
author = {Hankins, Matthew G and Mayer, Thomas M and Wheeler, David R},
abstractNote = {A method for depositing an anti-stiction coating on a MEMS device comprises reacting the vapor of an amino-functionalized silane precursor with a silicon surface of the MEMS device in a vacuum chamber. The method can further comprise cleaning the silicon surface of the MEMS device to form a clean hydroxylated silicon surface prior to reacting the precursor vapor with the silicon surface. The amino-functionalized silane precursor comprises at least one silicon atom, at least one reactive amino (or imine) pendant, and at least one hydrophobic pendant. The amino-functionalized silane precursor is highly reactive with the silicon surface, thereby eliminating the need for a post-process anneal step and enabling the reaction to occur at low pressure. Such vapor-phase deposition of the amino-functionalized silane coating provides a uniform surface morphology and strong adhesion to the silicon surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {5}
}

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Works referenced in this record:

Tribology of MEMS
journal, April 2001


Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems
journal, January 2000

  • Mayer, T. M.; de Boer, M. P.; Shinn, N. D.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 5
  • https://doi.org/10.1116/1.1288200

Surface processes in MEMS technology
journal, January 1998


The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers
journal, October 2000