Method of defining features on materials with a femtosecond laser

Roos, Edward Victor; Roeske, Franklin; Lee, Ronald S; Benterou, Jerry J

Title: Method of defining features on materials with a femtosecond laser

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Abstract

The invention relates to a pulsed laser ablation method of metals and/or dielectric films from the surface of a wafer, printed circuit board or a hybrid substrate. By utilizing a high-energy ultra-short pulses of laser light, such a method can be used to manufacture electronic circuits and/or electro-mechanical assemblies without affecting the material adjacent to the ablation zone.

Inventors:

Roos, Edward Victor ^[1]; Roeske, Franklin ^[2]; Lee, Ronald S ^[2]; Benterou, Jerry J ^[2]

Los Altos, CA
Livermore, CA

Issue Date:: 2006-05-23

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 908416

Patent Number(s):: 7049543

Application Number:: 10/704,459

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING

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B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
B23K2101/40 - Semiconductor devices
B23K26/0624 - {using ultrashort pulses, i.e. pulses of 1ns or less}
B23K2101/42 - Printed circuits
B23K2103/50 - {Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26}
B23K26/40 - taking account of the properties of the material involved
B23K26/361 - for deburring or mechanical trimming

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Roos, Edward Victor, Roeske, Franklin, Lee, Ronald S, and Benterou, Jerry J. Method of defining features on materials with a femtosecond laser.  United States: N. p., 2006. 
        Web.

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                    Roos, Edward Victor, Roeske, Franklin, Lee, Ronald S, & Benterou, Jerry J. Method of defining features on materials with a femtosecond laser.  United States.

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                    Roos, Edward Victor, Roeske, Franklin, Lee, Ronald S, and Benterou, Jerry J. Tue .  
        "Method of defining features on materials with a femtosecond laser".  United States.  https://www.osti.gov/servlets/purl/908416.

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@article{osti_908416,

  title        = {Method of defining features on materials with a femtosecond laser},

  author       = {Roos, Edward Victor and Roeske, Franklin and Lee, Ronald S and Benterou, Jerry J},

  abstractNote = {The invention relates to a pulsed laser ablation method of metals and/or dielectric films from the surface of a wafer, printed circuit board or a hybrid substrate. By utilizing a high-energy ultra-short pulses of laser light, such a method can be used to manufacture electronic circuits and/or electro-mechanical assemblies without affecting the material adjacent to the ablation zone.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2006},

  month        = {5}

}

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