System for generating two-dimensional masks from a three-dimensional model using topological analysis
Abstract
A method of generating two-dimensional masks from a three-dimensional model comprises providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements, reducing the three-dimensional model to a topological description of unique cross sections, and selecting candidate masks from the unique cross sections and the cross section topology. The method further can comprise reconciling the candidate masks based on the process mask requirements description to produce two-dimensional process masks.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 908352
- Patent Number(s):
- 7065736
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- DE-AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 97 MATHEMATICS AND COMPUTING
Citation Formats
Schiek, Richard. System for generating two-dimensional masks from a three-dimensional model using topological analysis. United States: N. p., 2006.
Web.
Schiek, Richard. System for generating two-dimensional masks from a three-dimensional model using topological analysis. United States.
Schiek, Richard. Tue .
"System for generating two-dimensional masks from a three-dimensional model using topological analysis". United States. https://www.osti.gov/servlets/purl/908352.
@article{osti_908352,
title = {System for generating two-dimensional masks from a three-dimensional model using topological analysis},
author = {Schiek, Richard},
abstractNote = {A method of generating two-dimensional masks from a three-dimensional model comprises providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements, reducing the three-dimensional model to a topological description of unique cross sections, and selecting candidate masks from the unique cross sections and the cross section topology. The method further can comprise reconciling the candidate masks based on the process mask requirements description to produce two-dimensional process masks.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {6}
}
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Works referenced in this record:
Development of a geometry-based process planning system for surface micromachining
journal, January 2002
- Cho, Sungwook; Lee, Kunwoo; Kim, Tae-Wan
- International Journal of Production Research, Vol. 40, Issue 5