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Title: Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays

Abstract

A microelectromechanical (MEM) apparatus is disclosed which includes a platform that can be electrostatically tilted from being parallel to a substrate on which the platform to being tilted at an angle of 1 20 degrees with respect to the substrate. Once the platform has been tilted to a maximum angle of tilt, the platform can be locked in position using an electrostatically-operable latching mechanism which engages a tab protruding below the platform. The platform has a light-reflective upper surface which can be optionally coated to provide an enhanced reflectivity and form a micromirror. An array of such micromirrors can be formed on a common substrate for applications including optical switching (e.g. for fiber optic communications), optical information processing, image projection displays or non-volatile optical memories.

Inventors:
 [1];  [2];  [3]
  1. Albuquerque, NM
  2. Tijeras, NM
  3. Cedar Crest, NM
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
907972
Patent Number(s):
7148603
Application Number:
10/307,216
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Garcia, Ernest J, Polosky, Marc A, and Sleefe, Gerard E. Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays. United States: N. p., 2006. Web.
Garcia, Ernest J, Polosky, Marc A, & Sleefe, Gerard E. Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays. United States.
Garcia, Ernest J, Polosky, Marc A, and Sleefe, Gerard E. Tue . "Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays". United States. https://www.osti.gov/servlets/purl/907972.
@article{osti_907972,
title = {Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays},
author = {Garcia, Ernest J and Polosky, Marc A and Sleefe, Gerard E},
abstractNote = {A microelectromechanical (MEM) apparatus is disclosed which includes a platform that can be electrostatically tilted from being parallel to a substrate on which the platform to being tilted at an angle of 1 20 degrees with respect to the substrate. Once the platform has been tilted to a maximum angle of tilt, the platform can be locked in position using an electrostatically-operable latching mechanism which engages a tab protruding below the platform. The platform has a light-reflective upper surface which can be optionally coated to provide an enhanced reflectivity and form a micromirror. An array of such micromirrors can be formed on a common substrate for applications including optical switching (e.g. for fiber optic communications), optical information processing, image projection displays or non-volatile optical memories.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {12}
}

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Works referenced in this record:

Silicon micromirrors and their prospective application in the Next-Generation Space Telescope
conference, November 2002

  • Garcia, Ernest J.; Polosky, Marc A.; Sleefe, Gerard E.
  • International Symposium on Optical Science and Technology, SPIE Proceedings
  • https://doi.org/10.1117/12.453829