Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays
Abstract
A microelectromechanical (MEM) apparatus is disclosed which includes a platform that can be electrostatically tilted from being parallel to a substrate on which the platform to being tilted at an angle of 1 20 degrees with respect to the substrate. Once the platform has been tilted to a maximum angle of tilt, the platform can be locked in position using an electrostatically-operable latching mechanism which engages a tab protruding below the platform. The platform has a light-reflective upper surface which can be optionally coated to provide an enhanced reflectivity and form a micromirror. An array of such micromirrors can be formed on a common substrate for applications including optical switching (e.g. for fiber optic communications), optical information processing, image projection displays or non-volatile optical memories.
- Inventors:
-
- Albuquerque, NM
- Tijeras, NM
- Cedar Crest, NM
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 907972
- Patent Number(s):
- 7148603
- Application Number:
- 10/307,216
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Garcia, Ernest J, Polosky, Marc A, and Sleefe, Gerard E. Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays. United States: N. p., 2006.
Web.
Garcia, Ernest J, Polosky, Marc A, & Sleefe, Gerard E. Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays. United States.
Garcia, Ernest J, Polosky, Marc A, and Sleefe, Gerard E. Tue .
"Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays". United States. https://www.osti.gov/servlets/purl/907972.
@article{osti_907972,
title = {Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays},
author = {Garcia, Ernest J and Polosky, Marc A and Sleefe, Gerard E},
abstractNote = {A microelectromechanical (MEM) apparatus is disclosed which includes a platform that can be electrostatically tilted from being parallel to a substrate on which the platform to being tilted at an angle of 1 20 degrees with respect to the substrate. Once the platform has been tilted to a maximum angle of tilt, the platform can be locked in position using an electrostatically-operable latching mechanism which engages a tab protruding below the platform. The platform has a light-reflective upper surface which can be optionally coated to provide an enhanced reflectivity and form a micromirror. An array of such micromirrors can be formed on a common substrate for applications including optical switching (e.g. for fiber optic communications), optical information processing, image projection displays or non-volatile optical memories.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 12 00:00:00 EST 2006},
month = {Tue Dec 12 00:00:00 EST 2006}
}
Works referenced in this record:
Silicon micromirrors and their prospective application in the Next-Generation Space Telescope
conference, November 2002
- Garcia, Ernest J.; Polosky, Marc A.; Sleefe, Gerard E.
- International Symposium on Optical Science and Technology, SPIE Proceedings