Title: Magnetic Transparent Conducting Oxide Film And Method Of Making

Abstract

Cobalt-nickel oxide films of nominal 100 nm thickness, and resistivity as low as 0.06 O·cm have been deposited by spin-casting from both aqueous and organic precursor solutions followed by annealing at 450° C. in air. An increase in film resistivity was found upon substitution of other cations (e.g., Zn2+, Al3+) for Ni in the spinel structure. However, some improvement in the mechanical properties of the films resulted. On the other hand, addition of small amounts of Li decreased the resistivity. A combination of XRD, XPS, UV/Vis and Raman spectroscopy indicated that NiCo2O4 is the primary conducting component and that the conductivity reaches a maximum at this stoichiometry. When x<0.67, NiO forms leading to an increase in resistivity; when x>0.67, the oxide was all spinel but the increased Co content lowered the conductivity.

Inventors:

Windisch, Jr., Charles F. ^[1]; Exarhos, Gregory J ^[2]; Sharma, Shiv K ^[3]

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+ Show Inventor Affiliations

1. (Richland, WA)
2. Richland, WA
3. Honolulu, HI

Issue Date:

2006-03-14

Research Org.:

Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)

OSTI Identifier:

880474

Patent Number(s):

7011732

Application Number:

10/854546

Assignee:

Battelle Memorial Institute (Richland, WA)

Patent Classifications (CPCs):

C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS

C03C17/245 - by deposition from the vapour phase
C03C17/25 - by deposition from the liquid phase
C03C17/256 - {Coating containing TiO2}
C03C2217/212 - TiO2
C03C2217/217 - FeOx, CoOx, NiOx
C03C2217/228 - Other specific oxides
C03C2217/23 - Mixtures
C03C2218/116 - by spin-coating, centrifugation
C03C2218/156 - by magnetron sputtering

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C23C18/1212 - {Zeolites, glasses}
C23C18/1216 - {Metal oxides
C23C18/1245 - {Inorganic substrates other than metallic}
C23C18/1676 - {Heating of the solution}
C23C18/31 - Coating with metals

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

G02B1/10 - Optical coatings produced by application to, or surface treatment of, optical elements
G02B5/208 - {for use with infra-red or ultraviolet radiation, e.g. for separating visible light from infra-red and/or ultraviolet radiation}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01B - CABLES

H01B1/08 - oxides

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L31/022466 - {made of transparent conductive layers, e.g. TCO, ITO layers}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

Y10T428/12528 - Semiconductor component
Y10T428/12597 - Noncrystalline silica or noncrystalline plural-oxide component [e.g., glass, etc.]
Y10T428/1266 - O, S, or organic compound in metal component
Y10T428/12667 - Oxide of transition metal or Al
Y10T428/12736 - Al-base component

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DOE Contract Number:  

AC06-76RL01830

Resource Type:

Patent

Country of Publication:

United States

Language:

English