Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements

Hanson, Gregory R; Bingham, Philip R; Tobin, Ken W

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Title: Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements

Abstract

Systems and methods are described for spatial-heterodyne interferometry for reflection and transmission (SHIRT) measurements. A method includes digitally recording a first spatially-heterodyned hologram using a first reference beam and a first object beam; digitally recording a second spatially-heterodyned hologram using a second reference beam and a second object beam; Fourier analyzing the digitally recorded first spatially-heterodyned hologram to define a first analyzed image; Fourier analyzing the digitally recorded second spatially-heterodyned hologram to define a second analyzed image; digitally filtering the first analyzed image to define a first result; and digitally filtering the second analyzed image to define a second result; performing a first inverse Fourier transform on the first result, and performing a second inverse Fourier transform on the second result. The first object beam is transmitted through an object that is at least partially translucent, and the second object beam is reflected from the object.

Inventors:

Hanson, Gregory R ^[1]; Bingham, Philip R ^[2]; Tobin, Ken W ^[3]

Clinton, TN
Knoxville, TN
Harriman, TN

Issue Date:: 2006-02-14

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 880162

Patent Number(s):: 6999178

Application Number:: 10/649474

Assignee:: UT-Battelle LLC (Oak Ridge, TN)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B11/0675 - {using interferometry}

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
G03F1/84 - Inspecting

G - PHYSICS G03 - PHOTOGRAPHY G03H - HOLOGRAPHIC PROCESSES OR APPARATUS
G03H1/0866 - {Digital holographic imaging, i.e. synthesizing holobjects from holograms}
G03H2001/0456 - {Spatial heterodyne, i.e. filtering a Fourier transform of the off-axis record}
G03H2001/0469 - {Object light being reflected by the object}
G03H2001/0471 - {Object light being transmitted through the object, e.g. illumination through living cells}
G03H2210/12 - Phase modulating object, e.g. living cell

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DOE Contract Number:: AC05-00OR22725

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Citation Formats


                    Hanson, Gregory R, Bingham, Philip R, and Tobin, Ken W. Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements.  United States: N. p., 2006. 
        Web.

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                    Hanson, Gregory R, Bingham, Philip R, & Tobin, Ken W. Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements.  United States.

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                    Hanson, Gregory R, Bingham, Philip R, and Tobin, Ken W. Tue .  
        "Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements".  United States.  https://www.osti.gov/servlets/purl/880162.

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@article{osti_880162,

  title        = {Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements},

  author       = {Hanson, Gregory R and Bingham, Philip R and Tobin, Ken W},

  abstractNote = {Systems and methods are described for spatial-heterodyne interferometry for reflection and transmission (SHIRT) measurements. A method includes digitally recording a first spatially-heterodyned hologram using a first reference beam and a first object beam; digitally recording a second spatially-heterodyned hologram using a second reference beam and a second object beam; Fourier analyzing the digitally recorded first spatially-heterodyned hologram to define a first analyzed image; Fourier analyzing the digitally recorded second spatially-heterodyned hologram to define a second analyzed image; digitally filtering the first analyzed image to define a first result; and digitally filtering the second analyzed image to define a second result; performing a first inverse Fourier transform on the first result, and performing a second inverse Fourier transform on the second result. The first object beam is transmitted through an object that is at least partially translucent, and the second object beam is reflected from the object.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2006},

  month        = {2}

}

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Works referenced in this record:

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Spatial filtering for zero-order and twin-image elimination in digital off-axis holography
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High-resolution photomask transmission and phase measurement tool
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Proceedings, annual meeting, Electron Microscopy Society of America, Vol. 52
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Similar Records

Title: Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements

Abstract

Citation Formats

Advanced electron holography: a new algorithm for image processing and a standardized quality test for the FEG electron microscope journal, April 1995

Digital holography for quantitative phase-contrast imaging journal, January 1999

Direct To Digital Holography For High Aspect Ratio Inspection of Semiconductor Wafers conference, January 2003

Spatial filtering for zero-order and twin-image elimination in digital off-axis holography journal, January 2000

Microscopy by reconstructed wave-fronts journal, July 1949

A software package for the processing and reconstruction of electron holograms journal, October 1995

Direct to digital holography for semiconductor wafer defect detection and review conference, July 2002

Wavefront Reconstruction with Diffused Illumination and Three-Dimensional Objects* journal, January 1964

Direct phase determination in hologram interferometry with use of digitally recorded holograms journal, January 1994

Fracional–Fringe Holographic Plasma Interferometry journal, January 1967

Reconstructed Wavefronts and Communication Theory* journal, January 1962

High-resolution photomask transmission and phase measurement tool conference, July 2002

Holographic Interferometry journal, February 1966

Wavefront Reconstruction with Continuous-Tone Objects* journal, January 1963

Holographic Interferometry Cookbook report, January 1972

Holographic Interferometry book, January 1994

Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms journal, January 1999

The extended Fourier algorithm: Application in discrete optics and electron holography journal, January 1994

Advanced electron holography: a new algorithm for image processing and a standardized quality test for the FEG electron microscope
journal, April 1995

Digital holography for quantitative phase-contrast imaging
journal, January 1999

Direct To Digital Holography For High Aspect Ratio Inspection of Semiconductor Wafers
conference, January 2003

Spatial filtering for zero-order and twin-image elimination in digital off-axis holography
journal, January 2000

Microscopy by reconstructed wave-fronts
journal, July 1949

A software package for the processing and reconstruction of electron holograms
journal, October 1995

Direct to digital holography for semiconductor wafer defect detection and review
conference, July 2002

Wavefront Reconstruction with Diffused Illumination and Three-Dimensional Objects*
journal, January 1964

Direct phase determination in hologram interferometry with use of digitally recorded holograms
journal, January 1994

Fracional–Fringe Holographic Plasma Interferometry
journal, January 1967

Reconstructed Wavefronts and Communication Theory*
journal, January 1962

High-resolution photomask transmission and phase measurement tool
conference, July 2002

Holographic Interferometry
journal, February 1966

Wavefront Reconstruction with Continuous-Tone Objects*
journal, January 1963

Holographic Interferometry Cookbook
report, January 1972

Holographic Interferometry
book, January 1994

Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms
journal, January 1999

The extended Fourier algorithm: Application in discrete optics and electron holography
journal, January 1994