Title: Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements

Abstract

Systems and methods are described for spatial-heterodyne interferometry for reflection and transmission (SHIRT) measurements. A method includes digitally recording a first spatially-heterodyned hologram using a first reference beam and a first object beam; digitally recording a second spatially-heterodyned hologram using a second reference beam and a second object beam; Fourier analyzing the digitally recorded first spatially-heterodyned hologram to define a first analyzed image; Fourier analyzing the digitally recorded second spatially-heterodyned hologram to define a second analyzed image; digitally filtering the first analyzed image to define a first result; and digitally filtering the second analyzed image to define a second result; performing a first inverse Fourier transform on the first result, and performing a second inverse Fourier transform on the second result. The first object beam is transmitted through an object that is at least partially translucent, and the second object beam is reflected from the object.

Inventors:

Hanson, Gregory R ^[1]; Bingham, Philip R ^[2]; Tobin, Ken W ^[3]

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+ Show Inventor Affiliations

1. Clinton, TN
2. Knoxville, TN
3. Harriman, TN

Issue Date:

Tue Feb 14 00:00:00 EST 2006

Research Org.:

Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

880162

Patent Number(s):

6999178

Application Number:

10/649474

Assignee:

UT-Battelle LLC (Oak Ridge, TN)

Patent Classifications (CPCs):

G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

G01B11/0675 - {using interferometry}

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES

G03F1/84 - Inspecting

G - PHYSICS G03 - PHOTOGRAPHY G03H - HOLOGRAPHIC PROCESSES OR APPARATUS

G03H1/0866 - {Digital holographic imaging, i.e. synthesizing holobjects from holograms}
G03H2001/0456 - {Spatial heterodyne, i.e. filtering a Fourier transform of the off-axis record}
G03H2001/0469 - {Object light being reflected by the object}
G03H2001/0471 - {Object light being transmitted through the object, e.g. illumination through living cells}
G03H2210/12 - Phase modulating object, e.g. living cell

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DOE Contract Number:  

AC05-00OR22725

Resource Type:

Patent

Country of Publication:

United States

Language:

English