Surface-Micromachined Microfluidic Devices

Galambos, Paul C; Okandan, Murat; Montague, Stephen; Smith, James H; Paul, Phillip H; Krygowski, Thomas W; Allen, James J; Nichols, Christopher A

Title: Surface-Micromachined Microfluidic Devices

Abstract

Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators. Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based onmore » « less

Inventors:

Galambos, Paul C ^[1]; Okandan, Murat ^[1]; Montague, Stephen ^[1]; Smith, James H ^[2]; Paul, Phillip H ^[3]; Krygowski, Thomas W ^[4]; Allen, James J ^[1]; Nichols, Christopher A ^[5]; Jakubczak, II, Jerome F. ^[6]

Albuquerque, NM
Redmond, WA
Livermore, CA
Coutlandt Manor, NY
Hauppauge, NY
(Rio Rancho, NM)

Issue Date:: 2004-09-28

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:: 879924

Patent Number(s):: 6797187

Application Number:: 10/351135

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2030/326 - {pumps}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
B01J2219/00853 - Employing electrode arrangements
B01J2219/00783 - Laminate assemblies, i.e. the reactor comprising a stack of plates

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L2200/12 - Specific details about manufacturing devices

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N27/44791 - {Microapparatus
G01N30/6095 - {Micromachined or nanomachined, e.g. micro- or nanosize}
G01N2030/285 - {electrically driven carrier}
G01N30/0005 - {Field flow fractionation}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L2400/0418 - electro-osmotic flow [EOF]

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
B01J2219/00828 - Silicon wafers or plates

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2030/0035 - {electrical field}
G01N30/02 - Column chromatography
G01N30/6069 - {with compartments or bed substructure}
G01N27/44773 - {Multi-stage electrophoresis, e.g. two-dimensional electrophoresis}

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
B01L3/502707 - {characterised by the manufacture of the container or its components

B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
B01J19/0093 - {Microreactors, e.g. miniaturised or microfabricated reactors

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Citation Formats


                    Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, and Jakubczak, II, Jerome F. Surface-Micromachined Microfluidic Devices.  United States: N. p., 2004. 
        Web.

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                    Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, & Jakubczak, II, Jerome F. Surface-Micromachined Microfluidic Devices.  United States.

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                    Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, and Jakubczak, II, Jerome F. Tue .  
        "Surface-Micromachined Microfluidic Devices".  United States.  https://www.osti.gov/servlets/purl/879924.

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@article{osti_879924,

  title        = {Surface-Micromachined Microfluidic Devices},

  author       = {Galambos, Paul C and Okandan, Murat and Montague, Stephen and Smith, James H and Paul, Phillip H and Krygowski, Thomas W and Allen, James J and Nichols, Christopher A and Jakubczak, II, Jerome F.},

  abstractNote = {Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators. Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2004},

  month        = {9}

}

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Works referenced in this record:

The zeta potential of silicon nitride thin films
journal, March 1991

Bousse, Luc; Mostarshed, Shahriar
Journal of Electroanalytical Chemistry and Interfacial Electrochemistry, Vol. 302, Issue 1-2
https://doi.org/10.1016/0022-0728(91)85046-R

An AC magnetohydrodynamic micropump
journal, May 2000

Lemoff, Asuncion V.; Lee, Abraham P.
Sensors and Actuators B: Chemical, Vol. 63, Issue 3
https://doi.org/10.1016/S0925-4005(00)00355-5

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Title: Surface-Micromachined Microfluidic Devices

Abstract

Citation Formats

The zeta potential of silicon nitride thin films journal, March 1991

An AC magnetohydrodynamic micropump journal, May 2000

The zeta potential of silicon nitride thin films
journal, March 1991

An AC magnetohydrodynamic micropump
journal, May 2000