Surface-Micromachined Microfluidic Devices
Abstract
Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators. Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based onmore »
- Inventors:
-
- Albuquerque, NM
- Redmond, WA
- Livermore, CA
- Coutlandt Manor, NY
- Hauppauge, NY
- (Rio Rancho, NM)
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 879924
- Patent Number(s):
- 6797187
- Application Number:
- 10/351135
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, and Jakubczak, II, Jerome F. Surface-Micromachined Microfluidic Devices. United States: N. p., 2004.
Web.
Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, & Jakubczak, II, Jerome F. Surface-Micromachined Microfluidic Devices. United States.
Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, and Jakubczak, II, Jerome F. Tue .
"Surface-Micromachined Microfluidic Devices". United States. https://www.osti.gov/servlets/purl/879924.
@article{osti_879924,
title = {Surface-Micromachined Microfluidic Devices},
author = {Galambos, Paul C and Okandan, Murat and Montague, Stephen and Smith, James H and Paul, Phillip H and Krygowski, Thomas W and Allen, James J and Nichols, Christopher A and Jakubczak, II, Jerome F.},
abstractNote = {Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators. Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {9}
}
Works referenced in this record:
The zeta potential of silicon nitride thin films
journal, March 1991
- Bousse, Luc; Mostarshed, Shahriar
- Journal of Electroanalytical Chemistry and Interfacial Electrochemistry, Vol. 302, Issue 1-2
An AC magnetohydrodynamic micropump
journal, May 2000
- Lemoff, Asuncion V.; Lee, Abraham P.
- Sensors and Actuators B: Chemical, Vol. 63, Issue 3